AbstractA review of the methods of characterization of materials using X-rays incident at grazing angles is presented. The rationale of all such methods is the need to obtain information from near-surface regions. The methods include grazing incidence diffraction, reflectivity, diffuse scatter and fluorescence. The experimental techniques are outlined, and the information obtainable and the methods of interpretation are discussed.
Characterization of Oxide Film Grown on Stainless Steel by a New In-House Grazing Incidence X-ray Scattering (GIXS) Apparatus