Silicon Nanomachining by Scanning Probe Lithography and Anisotropic Wet Etching

Microsystems - Materials & Process Integration for MEMS ◽

10.1007/978-1-4757-5791-0_8 ◽

2002 ◽

pp. 157-174

Author(s):

J. T. Sheu ◽

H. T. Chou ◽

W. L. Cheng ◽

C. H. Wu ◽

L. S. Yeou

Keyword(s):

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography

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Fabrication of nanoscaled-schottky diodes based on metal silicide/silicon nanowire with scanning probe lithography and Wet etching and its electrical characterization

10.7567/ssdm.2005.p9-4 ◽

2005 ◽

Author(s):

J. T. Sheu ◽

S. P. Yeh ◽

S. T. Tsai ◽

C. H. Lien

Keyword(s):

Silicon Nanowire ◽

Schottky Diodes ◽

Electrical Characterization ◽

Wet Etching ◽

Scanning Probe ◽

Metal Silicide ◽

Scanning Probe Lithography

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Nanoflash device with self-aligned double floating gates using scanning probe lithography and tetramethylammonium hydroxide wet etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1826060 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3154 ◽

Author(s):

J. T. Sheu ◽

C. C. Chen ◽

K. S. You ◽

S. T. Tsai

Keyword(s):

Wet Etching ◽

Tetramethylammonium Hydroxide ◽

Scanning Probe ◽

Scanning Probe Lithography ◽

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Fabrication of ultrahigh-density nano-pyramid arrays (NPAs) on [100] silicon wafer using scanning probe lithography and anisotropic wet etching

Proceedings of the 2nd IEEE Conference on Nanotechnology ◽

10.1109/nano.2002.1032246 ◽

2003 ◽

Author(s):

J.T. Sheu ◽

S.P. Yeh ◽

C.H. Wu ◽

K.S. You

Keyword(s):

Silicon Wafer ◽

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography ◽

Ultrahigh Density

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Directed Positioning of Single Cells in Microwells Fabricated by Scanning Probe Lithography and Wet Etching Methods

Langmuir ◽

10.1021/la701679a ◽

2008 ◽

Vol 24 (6) ◽

pp. 2597-2602 ◽

Author(s):

Inhee Choi ◽

Young In Yang ◽

Yun-Jung Kim ◽

Younghun Kim ◽

Ji-Sook Hahn ◽

...

Keyword(s):

Single Cells ◽

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography

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Single-electron transistor structures based on silicon-on-insulator silicon nanowire fabrication by scanning probe lithography and wet etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1523017 ◽

2002 ◽

Vol 20 (6) ◽

pp. 2824 ◽

Author(s):

J. T. Sheu ◽

K. S. You ◽

C. H. Wu ◽

K. M. Chang

Keyword(s):

Silicon Nanowire ◽

Wet Etching ◽

Silicon On Insulator ◽

Scanning Probe ◽

Single Electron ◽

Single Electron Transistor ◽

Scanning Probe Lithography

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Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1835318 ◽

2005 ◽

Vol 23 (1) ◽

pp. 66 ◽

Author(s):

F. S.-S. Chien ◽

W.-F. Hsieh ◽

S. Gwo ◽

J. Jun ◽

R. M. Silver ◽

...

Keyword(s):

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography

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Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching

10.1117/12.448972 ◽

2001 ◽

Author(s):

Kow-Ming Chang ◽

Kai-Shyang You ◽

Chia H. Wu ◽

Jeng Tzong Sheu

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Wet Etching ◽

Scanning Probe ◽

Nanostructure Fabrication ◽

Crystal Silicon ◽

Scanning Probe Lithography ◽

Silicon Nanostructure

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Fabrication and Electrical Characterization of Nanoscaled-Schottky Diodes Based on Metal Silicide/Silicon Nanowires with Scanning Probe Lithography and Wet Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.3686 ◽

2006 ◽

Vol 45 (4B) ◽

pp. 3686-3689 ◽

Author(s):

Jeng Tzong Sheu ◽

Sheng Pin Yeh ◽

Chen Hsin Lien ◽

S. T. Tsai

Keyword(s):

Silicon Nanowires ◽

Schottky Diodes ◽

Electrical Characterization ◽

Wet Etching ◽

Scanning Probe ◽

Metal Silicide ◽

Scanning Probe Lithography

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FABRICATION OF ULTRAHIGH-DENSITY NANO-PYRAMID ARRAYS (NPAs) ON (100) SILICON WAFER USING SCANNING PROBE LITHOGRAPHY AND ANISOTROPIC WET ETCHING

International Journal of Computational Engineering Science ◽

10.1142/s1465876303002076 ◽

2003 ◽

Vol 04 (03) ◽

pp. 695-698

Author(s):

JENG T. SHEU ◽

CHENG C. CHEN ◽

SUN P. YEH ◽

HSEIH T. CHOU

Keyword(s):

Silicon Wafer ◽

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography ◽

Ultrahigh Density

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Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching

Applied Physics Letters ◽

10.1063/1.125037 ◽

1999 ◽

Vol 75 (16) ◽

pp. 2429-2431 ◽

Author(s):

F. S.-S. Chien ◽

C.-L. Wu ◽

Y.-C. Chou ◽

T. T. Chen ◽

S. Gwo ◽

...

Keyword(s):

Wet Etching ◽

Scanning Probe ◽

Scanning Probe Lithography

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