Nanoflash device with self-aligned double floating gates using scanning probe lithography and tetramethylammonium hydroxide wet etching

2004 ◽  
Vol 22 (6) ◽  
pp. 3154 ◽  
Author(s):  
J. T. Sheu ◽  
C. C. Chen ◽  
K. S. You ◽  
S. T. Tsai
Keyword(s):  
Wet Etching ◽  
Tetramethylammonium Hydroxide ◽  
Scanning Probe ◽  
Scanning Probe Lithography ◽  
Floating Gates

Directed Positioning of Single Cells in Microwells Fabricated by Scanning Probe Lithography and Wet Etching Methods

Langmuir ◽  
2008 ◽  
Vol 24 (6) ◽  
pp. 2597-2602 ◽  
Author(s):  
Inhee Choi ◽  
Young In Yang ◽  
Yun-Jung Kim ◽  
Younghun Kim ◽  
Ji-Sook Hahn ◽  
...  
Keyword(s):  
Single Cells ◽  
Wet Etching ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching

1999 ◽  
Vol 75 (16) ◽  
pp. 2429-2431 ◽  
Author(s):  
F. S.-S. Chien ◽  
C.-L. Wu ◽  
Y.-C. Chou ◽  
T. T. Chen ◽  
S. Gwo ◽  
...  
Keyword(s):  
Wet Etching ◽  
Scanning Probe ◽  
Scanning Probe Lithography
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