The temperature and humidity conditions of a membrane electrode assembly (MEA)
determine the performance of fuel cells. The volume of traditional temperature and humidity
sensors is too large to allow them to be used to measure the distribution of temperature and
humidity in the MEA of fuel cells. Measurements cannot necessarily be made where required. They
measure only the temperature and humidity distribution outside the fuel cells and yield results with
errors that exceed those of measurements made in MEA.
Therefore, in this study, micro-electro-mechanical-systems (MEMS) fabrication technology was
employed to fabricate an array of micro sensors to monitor in situ the temperature and humidity
distributions within the MEA of fuel cells. In this investigation, an array of micro temperature and
humidity sensors was made from gold on the MEA. The advantages of array micro gold
temperature and humidity sensors are their small volume, which enable them to be placed on MEA
and their high sensitivity and accuracy. The dimensions of the temperature and humidity sensors are
180μm × 180μm and 180μm × 220μm, respectively.
The experiment involves temperatures from 30 to 100 °C. The resistance varied from 23.084 to
28.196 /. The experimental results reveal that the temperature is almost linearly related to the
resistance and the accuracy and sensitivity are less than 0.3 °C and 3.2×10-3/°C, respectively. The
humidity sensor showed that the capacitance changed from 15.76 to 17.95 pF, the relative humidity
from 20 to 95 %RH, and the accuracy and sensitivity were less than 0.25 %RH and 0.03 pF/%RH.