Study of the Influence of Ion Bombardment on the Quality of Coatings Obtained by the Vacuum Arc Deposition

2022 ◽  
pp. 40-46
Author(s):  
S. R. Shekhtman ◽  
N. A. Sukhova
Keyword(s):  
Ion Bombardment ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

scholarly journals Filtered cathodic vacuum arc deposition (FCVAD) technology as method for creation of nanostructured multicomponent modifying coatings for wide application range

Procedia CIRP ◽  
2020 ◽  
Vol 95 ◽  
pp. 999-1003
Author(s):  
Alexey Vereschaka ◽  
Marina Volosova ◽  
Nikolay Sitnikov ◽  
Nikolay Andreev ◽  
Filipp Milovich ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Application Range ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Vacuum arc deposition of thin films from an LaB6 cathode

1996 ◽  
Vol 82 (3) ◽  
pp. 247-253 ◽  
Author(s):  
S. Schmidbauer ◽  
H. Klose ◽  
A. Ehrlich ◽  
M. Friedrich ◽  
M. Röder ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Mechanism of apatite formation on silicon suboxide film prepared by pulsed metal vacuum arc deposition

2008 ◽  
Vol 109 (2-3) ◽  
pp. 342-346 ◽  
Author(s):  
Youtao Xie ◽  
Xuebin Zheng ◽  
Chuanxian Ding ◽  
Xuanyong Liu ◽  
Paul K. Chu
Keyword(s):  
Vacuum Arc ◽  
Apatite Formation ◽  
Silicon Suboxide ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Arc behaviour during filtered vacuum arc deposition of Sn-O thin films

1995 ◽  
Vol 76-77 ◽  
pp. 181-189 ◽  
Author(s):  
L. Kaplan ◽  
V.N. Zhitomirsky ◽  
S. Goldsmith ◽  
R.L. Boxman ◽  
I. Rusman
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Energetic Particle Synthesis of Metastable Layers for Superior Mechancial Properties

1997 ◽  
Vol 504 ◽  
Author(s):  
D. M. Follstaedt ◽  
J. A. Knapp ◽  
S. M. Myers ◽  
M. T. Dugger ◽  
T. A. Friedmann ◽  
...  
Keyword(s):  
Yield Stress ◽  
Metallic Glasses ◽  
Energetic Particle ◽  
Particle Methods ◽  
Vacuum Arc ◽  
Stick Slip ◽  
Particle Synthesis ◽  
Superior Mechanical Properties ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

ABSTRACTEnergetic particle methods have been used to synthesize two metastable layers with superior mechanical properties: amorphous Ni implanted with overlapping Ti and C, and amorphous diamond-like carbon (DLC) formed by vacuum-arc deposition or pulsed laser deposition. Elastic modulus, yield stress and hardness were reliably determined for both materials by fitting finiteelement simulations to the observed layer/substrate responses during nanoindentation. Both materials show exceptional properties, i.e., the yield stress of amorphous Ni(Ti,C) exceeds that of hardened steels and other metallic glasses, and the hardness of DLC (up to 88 GPa) approaches that of crystalline diamond (∼100 GPa). Tribological performance of the layers during unlubricated sliding contact appears favorable for treating Ni-based micro-electromechanical systems: stick-slip adhesion to Ni is eliminated, giving a low coefficient of friction (∼0.3–0.2) and greatly reduced wear. We discuss how energetic particle synthesis is critical to forming these phases and manipulating their properties for optimum performance.

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