High-Linearity MEMS Accelerometer with Lateral Comb Finger Groups

Author(s):  
Xingguo Xiong ◽  
Huanyu Li
2011 ◽  
Vol 483 ◽  
pp. 70-74
Author(s):  
Xiao Gang Li ◽  
Yong Mei ◽  
Wen Gang Huang ◽  
Zheng Yuan Zhang ◽  
Jian Gen Li ◽  
...  

A monolithic MEMS accelerometer process was established. This process successfully combines our standard BiCMOS technology and MEMS surface micromachining technique. The acceleration sensing element is a kind of comb-finger structure which is built by polysilicon surface micromachining technique. The polysilicon structure is designed to form two capacitors for acceleration sensing. The external acceleration will cause the value of two capacitors to vary in different direction. That means one reduces if the other increases. It was integrated with the signal conditioning circuit. In a single die, the active devices including vertical NPN, lateral PNP, PMOS and passive devices such as capacitors, resistors were fabricated which was followed by the steps to form the acceleration sensing structure. The experiment indicates that the fabricated circuit has the function of sensing capacitive variation and with a scale factor of 100mV/g.


2020 ◽  
Vol 23 (7) ◽  
pp. 25-33
Author(s):  
Luciane Agnoletti dos Santos Pedotti ◽  
Ricardo Mazza Zago ◽  
Mateus Giesbrecht ◽  
Fabiano Fruett

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.


Author(s):  
Abhiraj Basavanna ◽  
Matthias Dienger ◽  
Jan Rockstroh ◽  
Steffen Keller ◽  
Alfons Dehe

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  

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