ALD Al-doped ZnO Thin Film as Semiconductor and Piezoelectric Material: Process Synthesis

2018 ◽  
pp. 23-46 ◽  
Author(s):  
Ayman Rezk ◽  
Irfan Saadat
2020 ◽  
Vol 31 (9) ◽  
pp. 6948-6955
Author(s):  
Mustafa Özgür ◽  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Uğur Demirkol ◽  
Nihan Akkurt ◽  
...  

Author(s):  
Samia Tabassum ◽  
Eiji Yamasue ◽  
Hideyuki Okumura ◽  
Keiichi N. Ishihara
Keyword(s):  
Rf Power ◽  

2020 ◽  
Vol 217 (24) ◽  
pp. 2000537
Author(s):  
Shailendra Kr. Singh ◽  
Uttam Kr. Samanta ◽  
Anirban Dhar ◽  
Mrinmay Pal ◽  
Mukul Chandra Paul

2006 ◽  
Vol 320 ◽  
pp. 113-116
Author(s):  
Shigeru Tanaka ◽  
Yukari Ishikawa ◽  
Naoki Ohashi ◽  
Junichi Niitsuma ◽  
Takashi Sekiguchi ◽  
...  

We have obtained Er-doped ZnO thin film in a micropattern of reverse trapezoids processed on Si substrate by sputtering and ultrafine polishing techniques. Near-infrared light emission was detected successfully from the thin film filling a single micropit with 10 μm square. Transmission electron microscopy (TEM) observation showed epitaxial growth of ZnO crystals along the curvature of the micropit.


2007 ◽  
Vol 15 (17) ◽  
pp. 10666 ◽  
Author(s):  
S. W. Liu ◽  
J. L. Weerasinghe ◽  
J. Liu ◽  
J. Weaver ◽  
C. L. Chen ◽  
...  

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