Rutherford Backscattering and Nuclear Reaction Analysis Study of Plasma Oxidation of Silicides
1990 ◽
pp. 531-533
Keyword(s):
1995 ◽
Vol 120
(3-4)
◽
pp. 358-371
◽
2006 ◽
Vol 249
(1-2)
◽
pp. 132-135
◽
Keyword(s):
1992 ◽
pp. 279-286
1995 ◽
Vol 120
(3-4)
◽
pp. 358-371