Microwave and Dual-Frequency Plasma Processing

1997 ◽  
pp. 101-127 ◽  
Author(s):  
M. R. Wertheimer ◽  
L. Martinu ◽  
M. Moisan
Keyword(s):  
Plasma Processing ◽  
Dual Frequency ◽  
Frequency Plasma

Hydrogen/oxygen radio-frequency plasma processing of LiNbO3

1996 ◽  
Author(s):  
Hana Turcicova ◽  
Jiri Vacik ◽  
Jarmila Cervena ◽  
Vladimir Zelezny
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Transport through multicomponent dual frequency plasma sheaths

1994 ◽  
Vol 253 (1-2) ◽  
pp. 522-528 ◽  
Author(s):  
Frank R. Myers ◽  
Michael W. Peters ◽  
Manjula Ramaswami ◽  
Timothy S. Cale
Keyword(s):  
Dual Frequency ◽  
Frequency Plasma ◽  
Plasma Sheaths

Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma

1997 ◽  
Vol 15 (3) ◽  
pp. 985-991 ◽  
Author(s):  
J. E. Klemberg-Sapieha ◽  
D. Poitras ◽  
L. Martinu ◽  
N. L. S. Yamasaki ◽  
C. W. Lantman
Keyword(s):  
Dual Frequency ◽  
Frequency Plasma

High-Performance SiOF Film Fabricated Using a Dual-Frequency-Plasma Chemical Vapor Deposition system

2004 ◽  
Vol 43 (9A) ◽  
pp. 5984-5989 ◽  
Author(s):  
Takashi Yoda ◽  
Keiji Fujita ◽  
Hideshi Miyajima ◽  
Rempei Nakata ◽  
Yukio Nishiyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Performance ◽  
Chemical Vapor ◽  
Dual Frequency ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Frequency Plasma

High rate premetallization sputter etching of submicron vias using a high-density dual-frequency plasma source

1994 ◽  
Author(s):  
Eldon Chen ◽  
Sunnys Hsieh ◽  
Ting-Huang Lin ◽  
Murali K. Narasimhan ◽  
Mark Mueller ◽  
...  
Keyword(s):  
Plasma Source ◽  
High Density ◽  
High Rate ◽  
Dual Frequency ◽  
Frequency Plasma ◽  
Sputter Etching

Properties of multilayer and graded index Si-based coatings deposited in dual-frequency plasma

1993 ◽  
Author(s):  
Daniel Poitras ◽  
Jolanta E. Klemberg-Sapieha ◽  
A. Moussi ◽  
Ludvik Martinu
Keyword(s):  
Dual Frequency ◽  
Graded Index ◽  
Frequency Plasma

A Dual Frequency Plasma Sheath Model

1992 ◽  
Vol 139 (12) ◽  
pp. 3587-3595 ◽  
Author(s):  
Frank R. Myers ◽  
Timothy S. Cale
Keyword(s):  
Plasma Sheath ◽  
Dual Frequency ◽  
Frequency Plasma
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