Developing a Parametric Carbon Footprinting Tool: A Case Study of Wafer Fabrication in the Semiconductor Industry
2013 ◽
pp. 505-509
◽
Keyword(s):
2012 ◽
Vol 591-593
◽
pp. 704-707
◽
2003 ◽
Vol 37
(23)
◽
pp. 5373-5382
◽
2010 ◽
Vol 58
(4)
◽
pp. 672-679
◽