Developing a Parametric Carbon Footprinting Tool: A Case Study of Wafer Fabrication in the Semiconductor Industry

Author(s):  
Allen H. Hu ◽  
Ching-Yao Huang ◽  
Jessica Yin ◽  
Hsiao-Chun Wang ◽  
Ting-Hsin Wang
2010 ◽  
Vol 450 ◽  
pp. 365-368
Author(s):  
James C. Chen ◽  
Chia Wen Chen ◽  
Kou Huang Chen ◽  
Chien Hsin Lin

Wafer fabrication is a capital intensive industry. A 12-inch wafer fabrication plant needs a typical investment of US$ 3 billion, and the equipment cost constitutes about two-thirds to three-quarters of the total production costs. Therefore, capacity planning is crucial to the investment and performance of wafer fabrication plants. Several formulae are presented to calculate the required number of machines with sequential, parallel, and batch processing characteristics, respectively. An AutoSched AP simulation model using data from real foundry fabrication plants is used in a case study to evaluate the performance of the proposed formulae. Simulation results indicate that the proposed formulae can quickly and accurately calculate the required number of cluster tools leading to the required monthly output rate.


2012 ◽  
Vol 591-593 ◽  
pp. 704-707 ◽  
Author(s):  
Siew Hong Ding ◽  
Teing Tien Goh ◽  
Pei Sze Tan ◽  
Siew Ching Wee ◽  
Shahrul Kamaruddin

Suitable maintenance policy implemented in particular machine able to improve the machine performance as well as the product quality. However, selecting a suitable maintenance policy is a vital and hard work because it has to be decided from analysis of various criteria including failure mechanism and resources limitation. Thus, decision tree is suggested in this paper to provide assistance for maintenance crew in conducting a systematic and efficient decision making process in determining the suitable maintenance policy. In the end of the paper, a case study in semiconductor industry is conducted to illustrate the practicability of developed decision tree.


2003 ◽  
Vol 37 (23) ◽  
pp. 5373-5382 ◽  
Author(s):  
Cynthia F. Murphy ◽  
George A. Kenig ◽  
David T. Allen ◽  
Jean-Philippe Laurent ◽  
David E. Dyer

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