Effect of irradiation with intermediate-energy ions on structure and electrophysical properties of silicon dioxide films in a mos system

1978 ◽  
Vol 21 (12) ◽  
pp. 1550-1554
Author(s):  
T. A. Kholomina
1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  

2005 ◽  
Vol 22 (5-6) ◽  
pp. 201-204 ◽  
Author(s):  
Edward Eteshola ◽  
Leonard J. Brillson ◽  
Stephen Craig Lee

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  

1999 ◽  
Vol 75 (7) ◽  
pp. 959-961 ◽  
Author(s):  
J. Suñé ◽  
E. Miranda ◽  
M. Nafría ◽  
X. Aymerich

1994 ◽  
Vol 65 (14) ◽  
pp. 1820-1822 ◽  
Author(s):  
D. A. Buchanan ◽  
D. J. DiMaria ◽  
C‐A. Chang ◽  
Y. Taur

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