High resolution auger electron spectroscopy for materials characterization

1987 ◽  
Vol 91 (1-6) ◽  
pp. 321-345 ◽  
Author(s):  
Siegfried Hofmann
Keyword(s):  
High Resolution ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Materials Characterization

Advances In Analytical Auger Electron Spectroscopy

MRS Bulletin ◽  
1987 ◽  
Vol 12 (6) ◽  
pp. 70-74 ◽  
Author(s):  
Chuan C. Chang
Keyword(s):  
Quantitative Analysis ◽  
High Resolution ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Depth Profiling ◽  
Auger Spectroscopy ◽  
High Resolution Imaging ◽  
Auger Analysis ◽  
Resolution Imaging

AbstractFundamental principles and experimental procedures for fully utilizing the power of Auger analysis are discussed. Topics include: quantitative analysis, high resolution imaging, depth profiling, and noise reduction. These studies reveal several improvements that might be expected in the immediate future and how they might be achieved. Some knowledge of Auger spectroscopy is assumed, but references on theory, principles, instrumentation, and applications are cited.

High-Resolution Analysis on Patterned Resist by Auger Electron Spectroscopy

1993 ◽  
Vol 32 (Part 1, No. 12A) ◽  
pp. 5765-5770 ◽  
Author(s):  
Yuji Manabe ◽  
Reiko Takahashi ◽  
Toru Shiibashi ◽  
Kenji Yanagihara
Keyword(s):  
High Resolution ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
High Resolution Analysis ◽  
Resolution Analysis
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