High-order terminal iterative learning control with an application to a rapid thermal process for chemical vapor deposition

2007 ◽  
pp. 95-104 ◽  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Iterative Learning Control ◽  
Thermal Process ◽  
Chemical Vapor ◽  
Learning Control ◽  
Iterative Learning ◽  
High Order ◽  
Rapid Thermal Process

scholarly journals Iterative Learning Control for High-Order Systems With Arbitrary Initial Shifts

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 5147-5159
Author(s):  
Guojun Li ◽  
Yu Zhang ◽  
Kang Wang ◽  
Dongjie Chen
Keyword(s):  
Iterative Learning Control ◽  
Learning Control ◽  
Iterative Learning ◽  
High Order
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