Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process
2010 ◽
Vol 51
(1-4)
◽
pp. 155-162
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Keyword(s):
2009 ◽
Vol 87
(5-6)
◽
pp. 303-317
◽
2016 ◽
Vol 87
(3)
◽
pp. 033303
◽
Keyword(s):
Keyword(s):
2020 ◽
Vol 13
(4)
◽
pp. 132-142
Keyword(s):