Development and verification of six-degree-of-freedom error measurement system based on geometrical optics for linear stage

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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Analysis of multi-degree-of-freedom gear error measurement system based on Monte Carlo method

2019 14th IEEE Conference on Industrial Electronics and Applications (ICIEA) ◽

10.1109/iciea.2019.8834306 ◽

2019 ◽

Author(s):

Bai Zhang ◽

Jiakun Zhang ◽

Weiwei Zhang ◽

Juntao Pan ◽

Dechao Kong

Keyword(s):

Monte Carlo ◽

Monte Carlo Method ◽

Measurement System ◽

Degree Of Freedom ◽

Error Measurement

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Recent experiences with implementing a video-based six-degree-of-freedom measurement system for airplane models in a 20-foot-diameter vertical spin tunnel

10.1117/12.141379 ◽

1993 ◽

Cited By ~ 3

Author(s):

Walter L. Snow ◽

Brooks A. Childers ◽

Stephen B. Jones ◽

Charles M. Fremaux

Keyword(s):

Measurement System ◽

Degree Of Freedom ◽

Six Degree Of Freedom

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Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

Manufacturing Engineering and Materials Handling Engineering ◽

10.1115/imece2004-61029 ◽

2004 ◽

Author(s):

Wen-Yuh Jywe ◽

Chien-Hung Liu ◽

Sheng-Chung Tzeng ◽

Po Chou ◽

Chu-Wei Lin

Keyword(s):

Measuring Method ◽

Degree Of Freedom ◽

Angular Error ◽

Measuring System ◽

Linear Stage ◽

Process Verification ◽

Error Components ◽

Dual Beam ◽

Six Degree Of Freedom ◽

Straightness Error

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

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Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages

Sensors ◽

10.3390/s19183833 ◽

2019 ◽

Vol 19 (18) ◽

pp. 3833 ◽

Cited By ~ 3

Author(s):

Yindi Cai ◽

Qi Sang ◽

Zhi-Feng Lou ◽

Kuang-Chao Fan

Keyword(s):

Measurement System ◽

Measurement Accuracy ◽

Measurement Model ◽

Degree Of Freedom ◽

Linear Stage ◽

Laser Measurement ◽

Beam Spot ◽

Error Sources ◽

Laser Measurement System ◽

Dual Beam

A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would affect the measurement accuracy are considered. This LMS not only integrates the merits of error compensations for the laser beam drift, beam spot variation, detector sensitivity variation, and non-parallelism of dual-beam that have been resolved by the author’s group before, but also eliminates the crosstalk errors among five-DOF error motions in this study. The feasibility and effectiveness of the designed LMS and modified measurement model are experimentally verified using a laboratory-built prototype. The experimental results show that the designed LSM has the capability of simultaneously measuring the five-DOF error motions of a linear stage up to one-meter travel with a linear error accuracy in sub-micrometer and an angular error accuracy in sub-arcsecond after compensation.

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