Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

2004 ◽  
Author(s):  
Wen-Yuh Jywe ◽  
Chien-Hung Liu ◽  
Sheng-Chung Tzeng ◽  
Po Chou ◽  
Chu-Wei Lin
Keyword(s):  
Measuring Method ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Linear Stage ◽  
Process Verification ◽  
Error Components ◽  
Dual Beam ◽  
Six Degree Of Freedom ◽  
Straightness Error

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors

1992 ◽  
Vol 114 (3) ◽  
pp. 362-369 ◽  
Author(s):  
J. Ni ◽  
P. S. Huang ◽  
S. M. Wu
Keyword(s):  
Laser Beam ◽  
Simultaneous Measurement ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Geometric Errors ◽  
Measurement Quality ◽  
Laser Alignment ◽  
Straightness Error ◽  
Better Than

A precision multi-degree-of-freedom measuring (MDFM) system has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw, and roll errors of the moving axes of a CMM. The system is based on the principles of laser alignment and autocollimator. Its measurement principles and the influence of laser beam drifts on its measurement quality have been investigated and some improvement schemes have been implemented. Through the measurements of actual as well as artificially created geometric errors of the CMM, it has been found that the system’s accuracy of measuring straightness error components is better than 1 μm and its accuracy for angular error measurements is better than 0.5 arcsec.

scholarly journals Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool

Sensors ◽  
2018 ◽  
Vol 19 (1) ◽  
pp. 5 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Jia-Jun Lai ◽  
Yong-Tai Luo
Keyword(s):  
Degree Of Freedom ◽  
Geometric Errors ◽  
Light Path ◽  
Linear Guide ◽  
Positioning Errors ◽  
Speed Up ◽  
Analysis Design ◽  
Six Degree Of Freedom ◽  
Straightness Error ◽  
The Mathematical Model

This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 μm, and ±2.3 μm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 μm, 0.3 μm, and 3 μm, respectively.

scholarly journals Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages

Sensors ◽  
2019 ◽  
Vol 19 (18) ◽  
pp. 3833 ◽  
Author(s):  
Yindi Cai ◽  
Qi Sang ◽  
Zhi-Feng Lou ◽  
Kuang-Chao Fan
Keyword(s):  
Measurement System ◽  
Measurement Accuracy ◽  
Measurement Model ◽  
Degree Of Freedom ◽  
Linear Stage ◽  
Laser Measurement ◽  
Beam Spot ◽  
Error Sources ◽  
Laser Measurement System ◽  
Dual Beam

A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would affect the measurement accuracy are considered. This LMS not only integrates the merits of error compensations for the laser beam drift, beam spot variation, detector sensitivity variation, and non-parallelism of dual-beam that have been resolved by the author’s group before, but also eliminates the crosstalk errors among five-DOF error motions in this study. The feasibility and effectiveness of the designed LMS and modified measurement model are experimentally verified using a laboratory-built prototype. The experimental results show that the designed LSM has the capability of simultaneously measuring the five-DOF error motions of a linear stage up to one-meter travel with a linear error accuracy in sub-micrometer and an angular error accuracy in sub-arcsecond after compensation.

scholarly journals A Multi-Camera Rig with Non-Overlapping Views for Dynamic Six-Degree-of-Freedom Measurement

Sensors ◽  
2019 ◽  
Vol 19 (2) ◽  
pp. 250
Author(s):  
Zhiyuan Niu ◽  
Yongjie Ren ◽  
Linghui Yang ◽  
Jiarui Lin ◽  
Jigui Zhu
Keyword(s):  
Measurement Errors ◽  
Large Scale ◽  
Nearest Neighbor ◽  
Measuring Method ◽  
Intelligent Manufacturing ◽  
Degree Of Freedom ◽  
Feature Correspondence ◽  
Robust Solution ◽  
Vision Measurement ◽  
Six Degree Of Freedom

Large-scale measurement plays an increasingly important role in intelligent manufacturing. However, existing instruments have problems with immersive experiences. In this paper, an immersive positioning and measuring method based on augmented reality is introduced. An inside-out vision measurement approach using a multi-camera rig with non-overlapping views is presented for dynamic six-degree-of-freedom measurement. By using active LED markers, a flexible and robust solution is delivered to deal with complex manufacturing sites. The space resection adjustment principle is addressed and measurement errors are simulated. The improved Nearest Neighbor method is employed for feature correspondence. The proposed tracking method is verified by experiments and results with good performance are obtained.

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

2016 ◽  
Vol 87 (6) ◽  
pp. 065109 ◽  
Author(s):  
Xiangzhi Yu ◽  
Steven R. Gillmer ◽  
Shane C. Woody ◽  
Jonathan D. Ellis
Keyword(s):  
Measurement System ◽  
Degree Of Freedom ◽  
Linear Stage ◽  
Six Degree Of Freedom

scholarly journals Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Sensors ◽  
2018 ◽  
Vol 18 (11) ◽  
pp. 3875 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Yu-Fan Pu ◽  
Yu-Ta Chen ◽  
Yong-Tai Luo
Keyword(s):  
Measurement System ◽  
Taylor Series Expansion ◽  
Degree Of Freedom ◽  
Geometric Errors ◽  
Linear Stage ◽  
Six Degree Of Freedom ◽  
Geometric Motion ◽  
Laser Interferometers ◽  
Interferometer Method ◽  
Conventional Laser

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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