Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage

2011 ◽  
Vol 22 (10) ◽  
pp. 105901 ◽  
Author(s):  
ChaBum Lee ◽  
Gyu Ha Kim ◽  
Sun-Kyu Lee
Keyword(s):  
Single Unit ◽  
Degree Of Freedom ◽  
Error Measurement ◽  
Linear Stage ◽  
Optical Encoder ◽  
Motion Error ◽  
Six Degree Of Freedom ◽  
Design And Construction

Review on Multi-Degree-of-Freedom Motion Error Measurement Methods for Rotary-Axis Laser

2016 ◽  
Vol 53 (9) ◽  
pp. 090003
Author(s):  
杨婧 Yang Jing ◽  
冯其波 Feng Qibo ◽  
李家琨 Li Jiakun
Keyword(s):  
Measurement Methods ◽  
Degree Of Freedom ◽  
Error Measurement ◽  
Motion Error ◽  
Rotary Axis

Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

2004 ◽  
Author(s):  
Wen-Yuh Jywe ◽  
Chien-Hung Liu ◽  
Sheng-Chung Tzeng ◽  
Po Chou ◽  
Chu-Wei Lin
Keyword(s):  
Measuring Method ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Linear Stage ◽  
Process Verification ◽  
Error Components ◽  
Dual Beam ◽  
Six Degree Of Freedom ◽  
Straightness Error

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

2016 ◽  
Vol 87 (6) ◽  
pp. 065109 ◽  
Author(s):  
Xiangzhi Yu ◽  
Steven R. Gillmer ◽  
Shane C. Woody ◽  
Jonathan D. Ellis
Keyword(s):  
Measurement System ◽  
Degree Of Freedom ◽  
Linear Stage ◽  
Six Degree Of Freedom

scholarly journals Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Sensors ◽  
2018 ◽  
Vol 18 (11) ◽  
pp. 3875 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Yu-Fan Pu ◽  
Yu-Ta Chen ◽  
Yong-Tai Luo
Keyword(s):  
Measurement System ◽  
Taylor Series Expansion ◽  
Degree Of Freedom ◽  
Geometric Errors ◽  
Linear Stage ◽  
Six Degree Of Freedom ◽  
Geometric Motion ◽  
Laser Interferometers ◽  
Interferometer Method ◽  
Conventional Laser

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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