Pulsed laser ablation of TiO2 at 355 nm and 532 nm has been investigated using an angleand
time-resolved quadrupole mass spectrometric technique. The major ablated species include O (m/e = 16), O2 (m/e = 32), Ti (m/e = 48), TiO (m/e = 64) and TiO2 (m/e = 80). The time-of-flight (TOF) spectra of ablated species are measured for the ionic and neutral ablated species, and they can be fitted by a Maxwell – Boltzmann (M – B) distribution with a center-of-mass velocity. The measured angular distributions of the ionic species (O+ and Ti+) and the neutral species (O and Ti) can be fitted with cosnθ and a cosθ + (1−a)cosnθ, respectively. In addition, a continuous wave oxygen molecular beam is
introduced into the ablated plume, and the enhancement of the signal intensities of TiO
is observed. It implies that the ablated Ti atoms/ions species can react with ambient
oxygen molecules in the gas phase. In the meanwhile, the physicochemical mechanism of
pulsed laser ablation of TiO2 is discussed.
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