Monitoring of amorfization of the oxygen implanted layers in silicon wafers using photothermal radiometry and modulated free carrier absorption methods

Applied Physics A ◽

10.1007/s00339-014-8859-4 ◽

2014 ◽

Vol 118 (3) ◽

pp. 1009-1014 ◽

Author(s):

M. Maliński ◽

M. Pawlak ◽

Ł. Chrobak ◽

S. Pal ◽

A. Ludwig

Keyword(s):

Free Carrier ◽

Silicon Wafers ◽

Photothermal Radiometry ◽

Free Carrier Absorption ◽

Carrier Absorption

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Carrier Diffusivity Measurement in Silicon Wafers Using Free Carrier Absorption

International Journal of Thermophysics ◽

10.1007/s10765-013-1459-2 ◽

2013 ◽

Vol 34 (8-9) ◽

pp. 1721-1726 ◽

Author(s):

Xiren Zhang ◽

Bincheng Li

Keyword(s):

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Diffusivity Measurement ◽

Carrier Absorption

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Electronic transport characterization of silicon wafers by combination of modulated free carrier absorption and photocarrier radiometry

Journal of Applied Physics ◽

10.1063/1.3536620 ◽

2011 ◽

Vol 109 (2) ◽

pp. 023708 ◽

Author(s):

Qiuping Huang ◽

Bincheng Li

Keyword(s):

Electronic Transport ◽

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Photocarrier Radiometry ◽

Carrier Absorption

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Proof-of-concept framework to separate recombination processes in thin silicon wafers using transient free-carrier absorption spectroscopy

Journal of Applied Physics ◽

10.1063/1.4914160 ◽

2015 ◽

Vol 117 (10) ◽

pp. 105701 ◽

Author(s):

S. C. Siah ◽

M. T. Winkler ◽

D. M. Powell ◽

S. W. Johnston ◽

A. Kanevce ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Proof Of Concept ◽

Recombination Processes ◽

Carrier Absorption ◽

Thin Silicon ◽

Concept Framework

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Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting

Applied Physics Letters ◽

10.1063/1.2354006 ◽

2006 ◽

Vol 89 (11) ◽

pp. 112120 ◽

Author(s):

Xiren Zhang ◽

Bincheng Li ◽

Chunming Gao

Keyword(s):

Electronic Transport ◽

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Carrier Absorption

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Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers

Journal of Physics Conference Series ◽

10.1088/1742-6596/214/1/012116 ◽

2010 ◽

Vol 214 ◽

pp. 012116 ◽

Author(s):

Wei Li ◽

Bincheng Li

Keyword(s):

Transport Properties ◽

Electronic Transport ◽

Free Carrier ◽

Silicon Wafers ◽

Absorption Measurement ◽

Free Carrier Absorption ◽

Electronic Transport Properties ◽

Carrier Absorption

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Measurements of the optical absorption coefficient of Ar 8+ ion implanted silicon layers using the photothermal radiometry and the modulated free carrier absorption methods

Infrared Physics & Technology ◽

10.1016/j.infrared.2014.10.009 ◽

2014 ◽

Vol 67 ◽

pp. 604-608 ◽

Author(s):

Ł. Chrobak ◽

M. Maliński ◽

M. Pawlak

Keyword(s):

Optical Absorption ◽

Absorption Coefficient ◽

Free Carrier ◽

Photothermal Radiometry ◽

Optical Absorption Coefficient ◽

Free Carrier Absorption ◽

Carrier Absorption ◽

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Time-domain modulated free-carrier absorption measurements of recombination process in silicon wafers

The European Physical Journal Special Topics ◽

10.1140/epjst/e2008-00444-2 ◽

2008 ◽

Vol 153 (1) ◽

pp. 275-277

Author(s):

C. Gao ◽

B. Li ◽

X. Zhang

Keyword(s):

Time Domain ◽

Free Carrier ◽

Silicon Wafers ◽

Recombination Process ◽

Free Carrier Absorption ◽

Carrier Absorption ◽

Absorption Measurements

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Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers

Journal of Applied Physics ◽

10.1063/1.2840061 ◽

2008 ◽

Vol 103 (3) ◽

pp. 033709 ◽

Author(s):

Xiren Zhang ◽

Bincheng Li ◽

Chunming Gao

Keyword(s):

Sensitivity Analysis ◽

Transport Properties ◽

Electronic Transport ◽

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Electronic Transport Properties ◽

Absorption Determination ◽

Carrier Absorption

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Three-dimensional transient model for time-domain free-carrier absorption measurement of excess carriers in silicon wafers

Journal of Applied Physics ◽

10.1063/1.4852417 ◽

2013 ◽

Vol 114 (24) ◽

pp. 243702 ◽

Author(s):

Shengdong Ren ◽

Bincheng Li ◽

Qiuping Huang

Keyword(s):

Time Domain ◽

Three Dimensional ◽

Free Carrier ◽

Silicon Wafers ◽

Absorption Measurement ◽

Free Carrier Absorption ◽

Transient Model ◽

Carrier Absorption

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Accuracy Improvement of Multi-parameter Estimation in Combined Photocarrier Radiometry and Free Carrier Absorption for Characterization of Silicon Wafers

International Journal of Thermophysics ◽

10.1007/s10765-012-1267-0 ◽

2012 ◽

Vol 33 (10-11) ◽

pp. 2076-2081

Author(s):

Qiuping Huang ◽

Bincheng Li ◽

Shengdong Ren

Keyword(s):

Parameter Estimation ◽

Free Carrier ◽

Silicon Wafers ◽

Free Carrier Absorption ◽

Photocarrier Radiometry ◽

Accuracy Improvement ◽

Carrier Absorption

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