Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas
2010 ◽
2019 ◽
Vol 372
◽
pp. 9-15
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2019 ◽
Vol 511
◽
pp. 012030
1997 ◽
Vol 218
◽
pp. 68-73
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1995 ◽
Vol 256
(1-2)
◽
pp. 148-154
◽
2016 ◽
Vol 308
◽
pp. 115-120
◽
1999 ◽
Vol 17
(5)
◽
pp. 2841-2849
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