Optical and mechanical properties of nanocrystalline silicon dioxide films prepared by medium frequency magnetron sputtering

2010 ◽  
Author(s):  
Y. Z. Cao ◽  
Z. J. Hu ◽  
F. L. Yu ◽  
T. Sun ◽  
S. Dong
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Silicon Dioxide ◽  
Nanocrystalline Silicon ◽  
Medium Frequency ◽  
Silicon Dioxide Films ◽  
Optical And Mechanical Properties

Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas

2009 ◽  
Vol 16 (4) ◽  
pp. 505-510 ◽  
Author(s):  
Bo-Huei Liao ◽  
Cheng-Chung Lee ◽  
Cheng-Chung Jaing ◽  
Ming-Chung Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Pulse Magnetron ◽  
Optical And Mechanical Properties

Structure and Mechanical Properties of CrN Thick Films Deposited by High-Rate Medium-Frequency Magnetron Sputtering

2010 ◽  
Vol 12 (4) ◽  
pp. 442-446 ◽  
Author(s):  
Liu Chuansheng ◽  
Wang Hongjun ◽  
Zhou Lin ◽  
Zhang Rui ◽  
Tian Canxin ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Thick Films ◽  
High Rate ◽  
Medium Frequency
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