Structural, optical and mechanical properties of aluminium nitride films prepared by reactive DC magnetron sputtering
1997 ◽
Vol 218
◽
pp. 68-73
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2004 ◽
Vol 185
(2-3)
◽
pp. 245-253
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2003 ◽
Vol 52
(6Appendix)
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pp. 143-148
Keyword(s):
Keyword(s):
2010 ◽
Vol 204
(21-22)
◽
pp. 3371-3375
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2011 ◽
Vol 205
(21-22)
◽
pp. 5068-5072
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2010 ◽