Modeling of the Plasma Flow and Anode Region Inside a Direct Current Plasma Gun

2010 ◽  
Vol 20 (1-2) ◽  
pp. 21-27 ◽  
Author(s):  
Rodolphe Bolot ◽  
Christian Coddet ◽  
Alain Allimant ◽  
Dominique Billières
Keyword(s):  
Direct Current ◽  
Plasma Flow ◽  
Anode Region ◽  
Plasma Gun ◽  
Direct Current Plasma

Characterization of an Improved dc Plasma Excitation Source

1980 ◽  
Vol 34 (1) ◽  
pp. 24-30 ◽  
Author(s):  
G. N. Coleman ◽  
W. P. Braun ◽  
A. M. Allen
Keyword(s):  
Thermal Conductivity ◽  
Direct Current ◽  
Direct Evidence ◽  
Plasma Jet ◽  
Sample Introduction ◽  
Direct Current Plasma ◽  
Actual Mechanism ◽  
Improved Stability ◽  
Plasma Excitation

Several modifications of the direct current plasma jet have resulted in significantly enhanced analysis capabilities. Reducing the electrode angle, decreasing the aerosol chimney size, and operating in a diffuse mode with helium have provided improved stability, sensitivity, freedom from interferences, and detection limits. While the actual mechanism of the helium enhancement is not clear, no direct evidence was found which supports participation in the excitation step. Rather, improved desolvation, vaporization and possibly sample introduction result from the thermal conductivity of helium being much greater than that of argon.

Control of implantation area in direct-current plasma immersion ion implantation (DC-PIII)

2003 ◽  
Vol 31 (3) ◽  
pp. 356-361 ◽  
Author(s):  
R.K. Fu ◽  
Pai Peng ◽  
Xuchu Zeng ◽  
D.T. Kwok ◽  
P.K. Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation
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