Comparison of α particle detectors based on single-crystal diamond films grown in two types of gas atmospheres by microwave plasma-assisted chemical vapor deposition

On a semi-open holder, the homoepitaxial lateral growth of single-crystal diamond (SCD) was carried out via microwave plasma chemical vapor deposition (MPCVD). By tuning and optimizing two different structures of...

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Homoepitaxial growth of single crystal diamond by microwave plasma chemical vapor deposition

Carbon ◽

10.1016/j.carbon.2017.02.083 ◽

2017 ◽

Vol 117 ◽

pp. 490

Author(s):

Lei Yan ◽

Zhi-bin Ma ◽

Lin Chen ◽

Qiu-ming Fu ◽

Chao Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Homoepitaxial Growth ◽

Single Crystal Diamond

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Growth and Characterization of the Laterally Enlarged Single Crystal Diamond Grown by Microwave Plasma Chemical Vapor Deposition

Chinese Physics Letters ◽

10.1088/0256-307x/35/7/078101 ◽

2018 ◽

Vol 35 (7) ◽

pp. 078101 ◽

Cited By ~ 1

Author(s):

Ze-Yang Ren ◽

Jin-Feng Zhang ◽

Jin-Cheng Zhang ◽

Sheng-Rui Xu ◽

Chun-Fu Zhang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Single Crystal Diamond

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Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.01.120 ◽

2008 ◽

Vol 17 (7-10) ◽

pp. 1320-1323 ◽

Cited By ~ 15

Author(s):

R. Ramamurti ◽

M. Becker ◽

T. Schuelke ◽

T. Grotjohn ◽

D. Reinhard ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Single Crystal Diamond

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Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low-coherence interferometric control of growth rate

Diamond and Related Materials ◽

10.1016/j.diamond.2016.03.023 ◽

2016 ◽

Vol 66 ◽

pp. 83-89 ◽

Cited By ~ 9

Author(s):

E.V. Bushuev ◽

V.Yu. Yurov ◽

A.P. Bolshakov ◽

V.G. Ralchenko ◽

E.E. Ashkinazi ◽

...

Keyword(s):

Growth Rate ◽

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Low Coherence ◽

Single Crystal Diamond

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Step growth in single crystal diamond grown by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2005.08.054 ◽

2006 ◽

Vol 15 (2-3) ◽

pp. 304-308 ◽

Cited By ~ 11

Author(s):

Pawan K. Tyagi ◽

Abha Misra ◽

K.N. Narayanan Unni ◽

Padmnabh Rai ◽

Manoj K. Singh ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Single Crystal Diamond ◽

Step Growth

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Numerical Simulations to Study Growth of Single-Crystal Diamond by Using Microwave Plasma Chemical Vapor Deposition with Reactive (H, C, N) Species

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.090105 ◽

2012 ◽

Vol 51 (9R) ◽

pp. 090105 ◽

Cited By ~ 13

Author(s):

Hideaki Yamada

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Numerical Simulations ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Single Crystal Diamond

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Enhanced growth of high quality single crystal diamond by microwave plasma assisted chemical vapor deposition at high gas pressures

Applied Physics Letters ◽

10.1063/1.3072352 ◽

2009 ◽

Vol 94 (2) ◽

pp. 024103 ◽

Cited By ~ 44

Author(s):

Qi Liang ◽

Cheng Yi Chin ◽

Joseph Lai ◽

Chih-shiue Yan ◽

Yufei Meng ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

High Quality ◽

High Quality Single Crystal ◽

Single Crystal Diamond ◽

Gas Pressures

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Morphologic study of (100) single crystal diamond films epitaxially grown by chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(93)90262-u ◽

1993 ◽

Vol 132 (1-2) ◽

pp. 200-204 ◽

Cited By ~ 5

Author(s):

Z.M. Zhang ◽

H.M. Cheng ◽

S.H. Li ◽

Q.Y. Cai ◽

D.L. Ling ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Morphologic Study ◽

Single Crystal Diamond

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Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2009.01.031 ◽

2009 ◽

Vol 18 (5-8) ◽

pp. 704-706 ◽

Cited By ~ 13

Author(s):

R. Ramamurti ◽

M. Becker ◽

T. Schuelke ◽

T.A. Grotjohn ◽

D.K. Reinhard ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Single Crystal Diamond

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