Dopant Segregation and Heat Treatment Effects on the Electrical Properties of Polycrystalline Silicon thin Films

Silicon ◽  
2015 ◽  
Vol 8 (4) ◽  
pp. 513-516 ◽  
Author(s):  
B. Zaidi ◽  
B. Hadjoudja ◽  
C. Shekhar ◽  
B. Chouial ◽  
R. Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Electrical Properties ◽  
Polycrystalline Silicon ◽  
Treatment Effects ◽  
Dopant Segregation ◽  
Silicon Thin Films

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H2O Vapor

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4254-4257 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Kentaro Ozaki ◽  
Keiko Saitoh
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with H2O Vapor

1998 ◽  
Vol 37 (Part 2, No. 2A) ◽  
pp. L112-L114 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Ai Hisamatsu ◽  
Kentaro Ozaki ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Study of Nitrogen Effect on the Boron Diffusion during Heat Treatment in Polycrystalline Silicon/Nitrogen-Doped Silicon Thin Films

2011 ◽  
Vol 50 (5) ◽  
pp. 051301 ◽  
Author(s):  
Lynda Saci ◽  
Ramdane Mahamdi ◽  
Farida Mansour ◽  
Jonathan Boucher ◽  
Maéva Collet ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Polycrystalline Silicon ◽  
Boron Diffusion ◽  
Nitrogen Doped ◽  
Silicon Thin Films ◽  
Nitrogen Effect ◽  
Doped Silicon

Reduction of defects of polycrystalline silicon thin films by heat treatment with high-pressure H2O vapor

2001 ◽  
Vol 65 (1-4) ◽  
pp. 577-583 ◽  
Author(s):  
T Sameshima ◽  
K Sakamoto ◽  
K Asada ◽  
M Kondo ◽  
A Matsuda ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition

2006 ◽  
Vol 497 (1-2) ◽  
pp. 157-162 ◽  
Author(s):  
Bin Ai ◽  
Hui Shen ◽  
Zongcun Liang ◽  
Zhi Chen ◽  
Guanglin Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Thin Films

Defect Reduction in Polycrystalline Silicon Thin Films by Heat Treatment with High-Pressure H2O Vapor

2007 ◽  
Vol 46 (3B) ◽  
pp. 1286-1289 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Hiromi Hayasaka ◽  
Masato Maki ◽  
Atsushi Masuda ◽  
Takuya Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Defect Reduction ◽  
Silicon Thin Films
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