Heterogeneous Crystallinity of Atomic-Layer-Deposited Zinc Oxide Thin Film Using Resonance Raman Scattering Analysis

2021 ◽  
Author(s):  
Ho Jae Shim ◽  
Jin Seok Kim ◽  
Won Da Ahn ◽  
Jin Hyun Choe ◽  
Donghyuk Oh ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Raman Scattering ◽  
Resonance Raman ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Resonance Raman Scattering

Highly Stable Atomic Layer Deposited Zinc Oxide Thin-Film Transistors Incorporating Triple O2Annealing

2017 ◽  
Vol 64 (10) ◽  
pp. 4114-4122 ◽  
Author(s):  
Zhi Ye ◽  
Hua Xu ◽  
Tengfei Liu ◽  
Ni Liu ◽  
Ying Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film

Fabrication of Atomic Layer Deposited Zinc Oxide Thin Film Transistors with Organic Gate Insulator on Flexible Substrate

2010 ◽  
Vol 529 (1) ◽  
pp. 131-136 ◽  
Author(s):  
Kyung Min Choi ◽  
Gun Woo Hyung ◽  
Jin Woo Yang ◽  
Ja Ryong Koo ◽  
Young Kwan Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
Flexible Substrate ◽  
Atomic Layer ◽  
Gate Insulator ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition
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