Multi-physics field simulation and parametric optimization of a medium-power inductively coupled plasma torch

Author(s):  
Minghao Yu ◽  
Bo Lv ◽  
Zeyang Qiu ◽  
Zhe Wang
Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 834
Author(s):  
Nan Yu ◽  
Renaud Jourdain ◽  
Mustapha Gourma ◽  
Fangda Xu ◽  
Adam Bennett ◽  
...  

This paper focuses on the power dissipation of a plasma torch used for an optical surface fabrication process. The process utilizes an inductively coupled plasma (ICP) torch that is equipped with a De-Laval nozzle for the delivery of a highly collimated plasma jet. The plasma torch makes use of a self-igniting coil and an intermediate co-axial tube made of alumina. The torch has a distinctive thermal and electrical response compared to regular ICP torches. In this study, the results of the power dissipation investigation reveal the true efficiency of the torch and discern its electrical response. By systematically measuring the coolant parameters (temperature change and flow rate), the power dissipation is extrapolated. The radio frequency power supply is set to 800 W, E mode, throughout the research presented in this study. The analytical results of power dissipation, derived from the experiments, show that 15.4% and 33.3% are dissipated by the nozzle and coil coolant channels, respectively. The experiments also enable the determination of the thermal time constant of the plasma torch for the entire range of RF power.


2013 ◽  
Vol 2013 ◽  
pp. 1-8 ◽  
Author(s):  
D. Vacher ◽  
S. Menecier ◽  
M. Dudeck ◽  
M. Dubois ◽  
B. Devouard ◽  
...  

Solid carbon is deposited on the surfaces of an inductively coupled plasma torch operating with a Titan like atmosphere plasma gas. The frame of the initial research is the study of the radiative properties of plasma encountered around a spacecraft during its hypersonic entry in upper layers of planetary atmosphere. Deposition of carbon is observed not only on the quartz tube outside the inductor but also on the ceramic protection of the torch injector. Carbon exhibits two types of morphology more or less dense and it is analyzed by various analytic devices as MEB, SEM, TEM, EDS and Raman spectroscopy. The gathered carbon powder shows the presence of nanostructured particles.


Sign in / Sign up

Export Citation Format

Share Document