Resistivity of phosphorus-doped sputter-deposited polycrystalline silicon films
1977 ◽
Vol 20
(11)
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pp. 925-930
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2019 ◽
Vol 11
(5)
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pp. 5554-5560
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Keyword(s):
1997 ◽
Vol 177
(3-4)
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pp. 191-195
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