Resistivity of phosphorus-doped sputter-deposited polycrystalline silicon films

1977 ◽  
Vol 20 (11) ◽  
pp. 925-930 ◽  
Author(s):  
Edgardo Gabilli ◽  
Sergio Guerri ◽  
Guido Masetti ◽  
Maurizio Severi
2019 ◽  
Vol 11 (5) ◽  
pp. 5554-5560 ◽  
Author(s):  
Thien N. Truong ◽  
Di Yan ◽  
Christian Samundsett ◽  
Rabin Basnet ◽  
Mike Tebyetekerwa ◽  
...  

2009 ◽  
Vol 105 (3) ◽  
pp. 033715 ◽  
Author(s):  
David L. Young ◽  
Howard M. Branz ◽  
Fude Liu ◽  
Robert Reedy ◽  
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...  

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