The role of plasmatron/magnetron systems in physical vapor deposition techniques

1978 ◽  
Vol 54 (1) ◽  
pp. 33-47 ◽  
Author(s):  
S. Schiller ◽  
U. Heisig ◽  
K. Goedicke
1998 ◽  
Vol 514 ◽  
Author(s):  
C-K. Hu ◽  
K. Y. Lee ◽  
L. Gignac ◽  
S. M. Rossnagel ◽  
C. Uzoh ◽  
...  

ABSTRACTWe demonstrate the extendibility of the Cu damascene process to 0.1 μm wide lines. Cu interconnects, 0.1 - 1 μm wide, were fabricated by a damascene process that produced planarized lines and vias, imbedded in insulators. This process was defined by 1) trench and via formation in blanket dielectrics using e-beam lithography and reactive ion etching, 2) trench fill using a series of metal depositions, and 3) chemical mechanical polishing to remove the field metals. Physical vapor and ionized physical vapor deposition techniques were used to deposit the adhesion/diffusion barrier liner and the Cu seed layer, respectively. The main Cu conductor was deposited by an electroplating method. The width of lines and vias were varied from 0.1 μm to 1 μm while the thicknesses were held constant at 0.45 μm. A near bamboo-like structure was observed in the sub-μm wide lines. The effective resistivity of the Cu lines was found to be about 2.3 μΩ-cm and was independent of width after annealing at 400 °C.


1999 ◽  
Vol 75 (26) ◽  
pp. 4091-4093 ◽  
Author(s):  
Stefan G. Mayr ◽  
Michael Moske ◽  
Konrad Samwer ◽  
Maggie E. Taylor ◽  
Harry A. Atwater

2019 ◽  
Vol 813 ◽  
pp. 165-170
Author(s):  
Maria P. Nikolova ◽  
Stefan Valkov ◽  
Stoyan Parshorov ◽  
Emil Yankov ◽  
Peter Petrov

The aim of the present study was to characterize two kinds of TiN/TiO2 coatings in terms of topography, composition, and electrochemical stability after immersion in simulated body fluid (SBF). Micropatterning of the substrate (Ti-5Al-4V alloy) was done by using electron beam modification (EBM) by scanning electron beam while nanostructured TiN/TiO2 films were deposited over EBM Ti5Al4V substrates using two physical vapor deposition techniques: 1) magnetron sputtering, and 2) cathodic arc and glow-discharge methods. When immersed for 7 and 14 days in SBF at static conditions (37±0.05 °C, pH 7.4), Ca/P ratio of the apatite deposits increased from approximately 1.5 up to near stoichiometric (1.67), respectively. After the initial decrease, the pH of the solution during soaking increased gradually reaching values close to 7.7 for both coatings. However, the weight gain of the samples with Arc coatings after the immersion period in SBF was nearly three times more than those with magnetron deposited coating. The electrochemical potentiodynamic tests performed in SBF indicated a shift in the corrosion potentials towards nobler direction after 7 and 14 days of immersion compared to non-immersed samples, whereas the corrosion current density was slightly increased.


2020 ◽  
Vol 46 (8) ◽  
pp. 10814-10819 ◽  
Author(s):  
Liangliang Liu ◽  
Wei Tang ◽  
Lin Zhou ◽  
Zhongcan Wu ◽  
Qingdong Ruan ◽  
...  

2016 ◽  
Vol 6 (1) ◽  
pp. 17-22 ◽  
Author(s):  
Zhuoxian Wang ◽  
Paul R. West ◽  
Xiangeng Meng ◽  
Nathaniel Kinsey ◽  
Vladimir M. Shalaev ◽  
...  

Abstract


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