Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide

AbstractIndium tin oxide is one of the most used transparent conducting oxides. In order to reduce the processing thermal budget and enhance compatibility of these films for such applications as transparent electrodes for solar cells and flat panel displays, lower deposition temperatures are desirable. The addition of a non-thermal energy source during deposition, in this case, a mercury lamp, has the ability to lower the required substrate temperature during processing while increasing the oxygen content of the deposited film through the added contribution of ionized species into the deposited material. We investigated the microstructure of UV-assisted pulsed laser deposited indium tin oxide films. Comparisons between the UV and non-UV films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.

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ChemInform Abstract: Bulk Phase Relations, Conductivity, and Transparency in Novel Bixbyite Transparent Conducting Oxide Solution in the Cadmium-Indium-Tin Oxide System.

ChemInform ◽

10.1002/chin.200133008 ◽

2010 ◽

Vol 32 (33) ◽

pp. no-no

Author(s):

Daniel R. Kammler ◽

Thomas O. Mason ◽

Kenneth R. Poeppelmeier

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Transparent Conducting Oxide ◽

Oxide System ◽

Phase Relations ◽

Bulk Phase ◽

Transparent Conducting ◽

Cadmium Indium

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Properties of Transparent Conducting Indium Tin Oxide Films Deposited by Reactive e-Beam Evaporation on Heated Glass

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.67-68.249 ◽

1999 ◽

Vol 67-68 ◽

pp. 249-254 ◽

Cited By ~ 2

Author(s):

G. Sinno ◽

C. Minarini ◽

S. Loreti ◽

G. Di Francia ◽

A. Salluzzo

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Transparent Conducting ◽

Tin Oxide Films ◽

Heated Glass

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Joining Of Green Body And Dense Substrate For Indium Tin Oxide Under Uniaxial Pressure In An Open Condition

Archives of Metallurgy and Materials ◽

10.1515/amm-2015-0099 ◽

2015 ◽

Vol 60 (2) ◽

pp. 1209-1212

Author(s):

G.-S. Moon ◽

T.-J. Chung ◽

S.-H. Yang ◽

G.-S. Hong ◽

K.-S. Oh

Keyword(s):

Grain Size ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Transparent Conducting Oxide ◽

Theoretical Density ◽

Uniaxial Pressure ◽

Green Body ◽

Grain Sizes ◽

Transparent Conducting ◽

The Difference

Abstract The green body and dense substrate of indium tin oxide was joined by uniaxially pressing at 0.3 MPa at 1300°C to test the restoring of the eroded part of transparent conducting oxide target. The green body was sintered to 98% of theoretical density under the suppression of shrinkage along the boundary below 5%. The boundary between two parts was free of pore but could be recognized from the difference in grain sizes. The joined part had the virtually same density with the substrate, but the grain size was less than one fifth compared with that of substrate.

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