Optical properties of amorphous carbon films formed by r.f. plasma deposition from methane
Keyword(s):
1990 ◽
Vol 41
(5)
◽
pp. 545-548
Keyword(s):
2002 ◽
Vol 16
(06n07)
◽
pp. 1096-1100
◽
Keyword(s):
1999 ◽
Vol 28
(1)
◽
pp. 226-230
◽
Keyword(s):
2001 ◽
Vol 10
(3-7)
◽
pp. 1132-1136
◽
2015 ◽
Vol 33
(6)
◽
pp. 061514
◽
1998 ◽
Vol 109
(1)
◽
pp. 23-28
◽
Influence of nitrogen and temperature on the plasma deposition of fluorinated amorphous carbon films
2002 ◽
Vol 20
(4)
◽
pp. 1210-1215
◽