The effects of oxygen content on electrical and optical properties of indium tin oxide films fabricated by reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(96)08614-2 ◽

1996 ◽

Vol 281-282 ◽

pp. 206-208 ◽

Author(s):

Shinich Honda ◽

Michio Watamori ◽

Kenjiro Oura

Keyword(s):

Optical Properties ◽

Oxygen Content ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Effects of plasma treatment on the electrical and optical properties of indium tin oxide films fabricated by r.f. reactive sputtering

Thin Solid Films ◽

10.1016/s0040-6090(01)00777-5 ◽

2001 ◽

Vol 386 (1) ◽

pp. 105-110 ◽

Author(s):

Ching-Ting Lee ◽

Qing-Xuan Yu ◽

Bang-Tai Tang ◽

Hsin-Ying Lee

Keyword(s):

Optical Properties ◽

Plasma Treatment ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Effect of annealing varied temperature on electrical and optical properties of indium tin oxide films at oxygen atmosphere

2009 6th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology ◽

10.1109/ecticon.2009.5137054 ◽

2009 ◽

Author(s):

I. Srithanachai ◽

S. Niemcharoen ◽

S. Ueamanapong ◽

K. Nutaman ◽

N. Atiwongsangthong

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Oxygen Atmosphere ◽

Electrical And Optical Properties ◽

Varied Temperature ◽

Tin Oxide Films

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Electrical and optical properties of sputtered ultra-thin indium tin oxide films using xenon/argon gas

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-019-01171-w ◽

2019 ◽

Vol 30 (9) ◽

pp. 8508-8514

Author(s):

F. Hamouda ◽

E. Herth ◽

C. David ◽

F. Bayle ◽

M. P. Plante ◽

...

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Argon Gas ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

Applied Surface Science ◽

10.1016/0169-4332(93)90233-2 ◽

1993 ◽

Vol 68 (4) ◽

pp. 497-504 ◽

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide films

Semiconductor Science and Technology ◽

10.1088/0268-1242/11/2/009 ◽

1996 ◽

Vol 11 (2) ◽

pp. 196-202 ◽

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Oxygen Concentration ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Electrical And Optical Properties ◽

Effect Of Oxygen ◽

Tin Oxide Films

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Electrical and optical properties of sprayed indium tin oxide films

10.1117/12.56982 ◽

1992 ◽

Author(s):

V. Vasu ◽

A. Subrahmanyam

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by RPD at room temperature

Materials Letters ◽

10.1016/j.matlet.2016.06.084 ◽

2016 ◽

Vol 182 ◽

pp. 32-35 ◽

Author(s):

Jianhua Shi ◽

Leilei Shen ◽

Fanying Meng ◽

Zhengxin Liu

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Structural, electrical and optical properties of indium tin oxide films prepared by low-energy oxygen-ion-beam assisted deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(03)00760-2 ◽

2003 ◽

Vol 206 ◽

pp. 348-352 ◽

Author(s):

C. Liu ◽

T. Matsutani ◽

T. Asanuma ◽

M. Kiuchi

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Ion Beam Assisted Deposition ◽

Tin Oxide Films

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Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres

Applied Surface Science ◽

10.1016/s0169-4332(98)00659-x ◽

1999 ◽

Vol 142 (1-4) ◽

pp. 248-252 ◽

Author(s):

Birgitte Thestrup ◽

Jørgen Schou ◽

Arne Nordskov ◽

Niels B Larsen

Keyword(s):

Optical Properties ◽

Laser Ablation ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Rare Gas ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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