Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Chih-hao Yang; Shih-chin Lee; Tien-chai Lin; Suz-cheng Chen

doi:10.1016/j.tsf.2007.05.093

Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Cited By ~ 54

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Structural, electrical, and optical properties of antimony-doped tin oxide films prepared at room temperature by radio frequency magnetron sputtering for transparent electrodes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3139891 ◽

2009 ◽

Vol 27 (4) ◽

pp. 996-1000 ◽

Cited By ~ 12

Author(s):

Sung Uk Lee ◽

Byungyou Hong ◽

Won Seok Choi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Transparent Electrodes ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide films

Semiconductor Science and Technology ◽

10.1088/0268-1242/11/2/009 ◽

1996 ◽

Vol 11 (2) ◽

pp. 196-202 ◽

Cited By ~ 60

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Oxygen Concentration ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Electrical And Optical Properties ◽

Effect Of Oxygen ◽

Tin Oxide Films

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A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1584038 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1069-1072 ◽

Cited By ~ 9

Author(s):

Deuk Yeon Lee ◽

Se-Jong Lee ◽

Kie Moon Song ◽

Hong Koo Baik

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

International Photonics and Optoelectronics Meetings (POEM) ◽

10.1364/aoee.2013.asa3a.24 ◽

2013 ◽

Author(s):

Ge Wang ◽

Lei Zhao ◽

Hongwei Diao ◽

Jingwei Chen ◽

Baojun Yan ◽

...

Keyword(s):

Optical Properties ◽

Oxide Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Thickness Dependence ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(96)09311-x ◽

1997 ◽

Vol 298 (1-2) ◽

pp. 221-227 ◽

Cited By ~ 82

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films deposited on polyethylene naphthalate substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.10.016 ◽

2009 ◽

Vol 517 (8) ◽

pp. 2596-2601 ◽

Cited By ~ 21

Author(s):

M.G. Sandoval-Paz ◽

R. Ramírez-Bon

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Polyethylene Naphthalate ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering

10.1117/12.360113 ◽

1999 ◽

Author(s):

Hui-Wen Chou ◽

W. J. Lee ◽

Rung-Ywan Tsai ◽

Yuen Keun Fang ◽

C. C. Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films ◽

Pulsed Magnetron

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Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1566789 ◽

2003 ◽

Vol 21 (3) ◽

pp. 745-751 ◽

Cited By ~ 57

Author(s):

P. F. Carcia ◽

R. S. McLean ◽

M. H. Reilly ◽

Z. G. Li ◽

L. J. Pillione ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Preparation of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Journal of Wuhan University of Technology-Mater Sci Ed ◽

10.1007/bf02841274 ◽

2005 ◽

Vol 20 (4) ◽

pp. 22-25 ◽

Cited By ~ 2

Author(s):

Liu Jing ◽

Gong Jian ◽

Gu Zhen'an

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene napthalate substrates deposited by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.12.146 ◽

2008 ◽

Vol 516 (12) ◽

pp. 4064-4069 ◽

Cited By ~ 13

Author(s):

S.K. Bhagat ◽

H. Han ◽

Y. Zoo ◽

J. Lewis ◽

S. Grego ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Deposition Parameters ◽

Tin Oxide Films

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