The energy spectra of cathode sputtering products at metal bombardment by light ions

Vacuum ◽  
1971 ◽  
Vol 21 (1-2) ◽  
pp. 66
2009 ◽  
Vol 27 (2) ◽  
pp. 321-326 ◽  
Author(s):  
K.I. Popov ◽  
V.Yu. Bychenkov ◽  
W. Rozmus ◽  
V.F. Kovalev ◽  
R.D. Sydora

AbstractKinetic collisionless expansion of a spherical cluster composed of light and heavy cold ions and hot electrons is studied for arbitrary electron temperature. A wide set of regimes of plasma expansion, from nearly quasi-neutral to Coulomb explosion, is described from a unified description. The time evolution of the velocity, density, and energy spectra for accelerated ions is studied. The study demonstrates that an optimum light ion concentration from few percent to few tens percent, depending on the electron temperature, leads to a quasi-monoenergetic spectra with numbers as high as 70–80% of the total number of light ions.


2021 ◽  
Vol 2144 (1) ◽  
pp. 012016
Author(s):  
V P Afanas’ev ◽  
L G Lobanova ◽  
D N Selyakov ◽  
M A Semenov-Shefov

Abstract Analytical solution for the reflected light ions Pass Length Distribution Function (PLDF) equation is obtained. Reflected ions energy spectra calculated on the basis of the developed method shows satisfactory agreement with experimental data. The effectiveness of the developed methodology in the procedure for verifying the stopping power value is indicated.


1978 ◽  
Vol 16 (3) ◽  
pp. 247-253 ◽  
Author(s):  
U. Littmark ◽  
A. Gras-Marti
Keyword(s):  

2018 ◽  
Vol 9 (3) ◽  
pp. 227-233 ◽  
Author(s):  
G. G. Bondarenko ◽  
V. I. Kristya ◽  
D. O. Savichkin ◽  
P. Żukowski

The mixture of argon and mercury vapor is used as the background gas in different types of gas discharge illuminating lamps. The aim of this work was development of a model, describing transport of electrons, ions and fast atoms in the one-dimensional low-current gas discharge in argon-mercury mixture, and determination of the dependence of their contributions to the cathode sputtering, limiting the device service time, on the temperature.For simulation of motion of electrons we used the Monte Carlo method of statistical modeling, whereas the ion and metastable excited atom motion, in order to reduce the calculation time, we described on the basis of their macroscopic transport equations, which allowed to obtain their flow densities at the cathode surface. Then, using the Monte Carlo method, we found the energy spectra of ions and fast atoms, generated in collisions of ions with mixture atoms, at the cathode surface and also the effective coefficients of the cathode sputtering by each type of particles.Calculations showed that the flow densities of argon ions and fast argon atoms, produced in collisions of argon ions with slow argon atoms, do not depend on the temperature, while the flow densities of mercury ions and fast argon atoms generated by them grow rapidly with the temperature due to an increase of mercury content in the mixture.There are represented results of modeling of the energy spectra of ions and fast atoms at the cathode surface. They demonstrate that at low mercury content in the mixture of the order of 10–3 the energies of mercury ions exceed that of the other types of particles, so that the cathode is sputtered mainly by mercury ions, and their contribution to sputtering is reduced at a mixture temperature decrease.


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