Optical emission spectroscopy of active species in a TiCN PVD arc discharge
1995 ◽
Vol 76-77
◽
pp. 687-693
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Keyword(s):
1995 ◽
Vol 76-77
◽
pp. 687-693
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Keyword(s):
1996 ◽
Vol 355
(3-4)
◽
pp. 244-246
◽
2006 ◽
Vol 14
(1)
◽
pp. 61-70
◽
Keyword(s):
2015 ◽
Vol 109
◽
pp. 31-38
◽
Keyword(s):
Keyword(s):