Wafer Charge Control in the E1000 Ion Implanter

Author(s):  
Shu Satoh ◽  
Daniel F. Downey ◽  
Reuel B. Liebert ◽  
Susan Felch
Keyword(s):  
1990 ◽  
Vol 26 (21) ◽  
pp. 1832
Author(s):  
J. Zou ◽  
A. Godinath ◽  
T. Akinwande ◽  
M.S. Shur

1990 ◽  
Vol 26 (14) ◽  
pp. 964
Author(s):  
J. Zou ◽  
A. Gopinath ◽  
T. Akinwande ◽  
M.S. Shur

1964 ◽  
Vol 11 (12) ◽  
pp. 556-562 ◽  
Author(s):  
D.C. Davies ◽  
R.B. Seeds ◽  
S.H. Shou
Keyword(s):  

2010 ◽  
Vol 12 (7) ◽  
pp. 1473 ◽  
Author(s):  
Dereje Hailu Taffa ◽  
Murugavel Kathiresan ◽  
Lorenz Walder ◽  
Britta Seelandt ◽  
Michael Wark

2012 ◽  
Vol 101 (9) ◽  
pp. 093506 ◽  
Author(s):  
A. V. Sampath ◽  
Q. G. Zhou ◽  
R. W. Enck ◽  
D. McIntosh ◽  
H. Shen ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document