The Low Pressure Plasma Processing Environment

Handbook of Physical Vapor Deposition (PVD) Processing ◽

10.1016/b978-0-8155-2037-5.00005-8 ◽

2010 ◽

pp. 157-193

Author(s):

Donald M. Mattox

Keyword(s):

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Intelligent control of low pressure plasma processing

IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) ◽

10.1109/iecon.2003.1280356 ◽

2004 ◽

Author(s):

J. Al-Kuzee ◽

T. Matsuura ◽

A. Goodyear ◽

L. Nolle ◽

A.A. Hopgood ◽

...

Keyword(s):

Intelligent Control ◽

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing

Vacuum ◽

10.1016/j.vacuum.2013.07.029 ◽

2014 ◽

Vol 101 ◽

pp. 46-52 ◽

Author(s):

Yasunori Ohtsu ◽

Junta Eguchi ◽

Yoshiki Yahata

Keyword(s):

Radio Frequency ◽

Hollow Cathode ◽

Discharge Plasma ◽

Plasma Processing ◽

Low Pressure ◽

Hollow Cathode Discharge ◽

Pressure Plasma ◽

Low Pressure Plasma

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The synthesis of CuxS from Cu layers by low pressure plasma processing

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.03.011 ◽

2017 ◽

Vol 708 ◽

pp. 1124-1130 ◽

Author(s):

J. Ball ◽

D.W. Lane ◽

H.S. Reehal

Keyword(s):

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study

Journal of Applied Physics ◽

10.1063/1.366297 ◽

1997 ◽

Vol 82 (11) ◽

pp. 5312-5320 ◽

Author(s):

Mark J. Kushner

Keyword(s):

Three Dimensional ◽

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Three Dimensional Modeling ◽

Dimensional Modeling ◽

Low Pressure Plasma ◽

Plasma Processing Reactors ◽

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Fundamentals of Plasma Processing(III). Low Pressure Plasma and its Applications.

JOURNAL OF THE JAPAN WELDING SOCIETY ◽

10.2207/qjjws1943.60.458 ◽

1991 ◽

Vol 60 (6) ◽

pp. 458-465

Author(s):

Misao Hashimoto

Keyword(s):

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Low Pressure Plasma Processing of Collagen Membranes for Anti-Cancer Drug Delivery

Journal of Material Science & Engineering ◽

10.4172/2169-0022.1000499 ◽

2018 ◽

Vol 07 (06) ◽

Author(s):

Alibi Baitukha ◽

Iman Al-Dybiat ◽

Azadeh Valinataj-Omran ◽

Jerome Pulpytel ◽

Marc Pocard ◽

...

Keyword(s):

Drug Delivery ◽

Plasma Processing ◽

Low Pressure ◽

Cancer Drug ◽

Pressure Plasma ◽

Anti Cancer ◽

Low Pressure Plasma ◽

Collagen Membranes ◽

Cancer Drug Delivery

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Review of Low Pressure Plasma Processing of Proton Exchange Membrane Fuel Cell Electrocatalysts

Plasma Processes and Polymers ◽

10.1002/ppap.201500171 ◽

2015 ◽

Vol 13 (1) ◽

pp. 10-18 ◽

Author(s):

Pascal Brault

Keyword(s):

Fuel Cell ◽

Proton Exchange Membrane ◽

Plasma Processing ◽

Low Pressure ◽

Proton Exchange ◽

Pressure Plasma ◽

Low Pressure Plasma ◽

Exchange Membrane

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The Low-Pressure Plasma Processing Environment

Handbook of Physical Vapor Deposition (PVD) Processing ◽

10.1016/b978-081551422-0.50005-x ◽

1998 ◽

pp. 237-287 ◽

Author(s):

Donald M. Mattox

Keyword(s):

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Adaptive Parallel Monte Carlo Simulations of Low-Pressure Plasma Processing

Parallel Computational Fluid Dynamics 1998 ◽

10.1016/b978-044482850-7/50108-x ◽

1999 ◽

pp. 387-394

Author(s):

Kuo-Chan Huang ◽

Jyun-Hwei Tsai

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma

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Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/3/034005 ◽

2015 ◽

Vol 24 (3) ◽

pp. 034005 ◽

Author(s):

Y Ohtsu ◽

T Yanagise

Keyword(s):

Spatial Structure ◽

Plasma Processing ◽

Low Pressure ◽

High Density ◽

Rf Plasma ◽

Pressure Plasma ◽

Low Pressure Plasma

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