Intelligent control of low pressure plasma processing

Author(s):  
J. Al-Kuzee ◽  
T. Matsuura ◽  
A. Goodyear ◽  
L. Nolle ◽  
A.A. Hopgood ◽  
...  
Author(s):  
Alibi Baitukha ◽  
Iman Al-Dybiat ◽  
Azadeh Valinataj-Omran ◽  
Jerome Pulpytel ◽  
Marc Pocard ◽  
...  

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