Growth behavior of high k LaAlO 3 films on Si by metalorganic chemical vapor deposition for alternative gate dielectric application

2005 ◽  
Vol 250 (1-4) ◽  
pp. 14-20 ◽  
Author(s):  
Qi-Yue Shao ◽  
Ai-Dong Li ◽  
Jin-Bo Cheng ◽  
Hui-Qin Ling ◽  
Di Wu ◽  
...  
1995 ◽  
Vol 146 (1-4) ◽  
pp. 482-488 ◽  
Author(s):  
Moo-Sung Kim ◽  
Yong Kim ◽  
Min-Suk Lee ◽  
Young Ju Park ◽  
Seong-II Kim ◽  
...  

2003 ◽  
Vol 83 (1) ◽  
pp. 129-131 ◽  
Author(s):  
Raffaella Lo Nigro ◽  
Vito Raineri ◽  
Corrado Bongiorno ◽  
Roberta Toro ◽  
Graziella Malandrino ◽  
...  

2015 ◽  
Vol 409 ◽  
pp. 51-55 ◽  
Author(s):  
Kun Zhou ◽  
Masao Ikeda ◽  
Jianping Liu ◽  
Shuming Zhang ◽  
Zengcheng Li ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document