In situ growth of SiNxas gate dielectric and surface passivation for AlN/GaN heterostructures by metalorganic chemical vapor deposition

2014 ◽  
Vol 7 (9) ◽  
pp. 091002 ◽  
Author(s):  
Jun Ma ◽  
Xing Lu ◽  
Huaxing Jiang ◽  
Chao Liu ◽  
Kei May Lau
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Surface Passivation ◽  
Gate Dielectric ◽  
Chemical Vapor ◽  
In Situ Growth ◽  
Metalorganic Chemical

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

1999 ◽  
Vol 38 (Part 2, No. 6A/B) ◽  
pp. L632-L635 ◽  
Author(s):  
Shuu'ichirou Yamamoto ◽  
Satoshi Sugai ◽  
Yasunari Matsukawa ◽  
Akio Sengoku ◽  
Hiroshi Tobisaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Monitoring ◽  
In Situ Growth ◽  
Metalorganic Chemical

In situ growth of epitaxial yttrium aluminum oxide (YAlO3) thin films by metalorganic chemical vapor deposition

1993 ◽  
Vol 5 (1) ◽  
pp. 14-16 ◽  
Author(s):  
Bin Han ◽  
Deborah A. Neumayer ◽  
Douglas L. Schulz ◽  
Bruce J. Hinds ◽  
Tobin J. Marks ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
In Situ Growth ◽  
Yttrium Aluminum Oxide ◽  
Yttrium Aluminum ◽  
Metalorganic Chemical

scholarly journals High-resistive layers obtained through periodic growth and in situ annealing of InGaN by metalorganic chemical vapor deposition

AIP Advances ◽  
2016 ◽  
Vol 6 (6) ◽  
pp. 065301
Author(s):  
Shuo Zhang ◽  
Ping Ma ◽  
Boting Liu ◽  
Dongxue Wu ◽  
Yuliang Huang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Periodic Growth ◽  
Metalorganic Chemical
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