Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering
2007 ◽
Vol 254
(2)
◽
pp. 473-479
◽
V. Jousseaume
◽
G. Rolland
◽
D. Babonneau
◽
J.-P. Simon