Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering

2005 ◽  
Vol 472 (1-2) ◽  
pp. 323-327 ◽  
Author(s):  
C.-H. Hsu ◽  
U-Ser Jeng ◽  
Hsin-Yi Lee ◽  
Chih-Mon Huang ◽  
K.S. Liang ◽  
...  
Keyword(s):  
Thin Film ◽  
Structural Study ◽  
Small Angle ◽  
Grazing Incidence ◽  
Dielectric Thin Film ◽  
X Ray ◽  
Low Dielectric ◽  
X Ray Scattering ◽  
Ray Scattering

scholarly journals Characterization of Lipid-Templated Silica and Hybrid Thin Film Mesophases by Grazing Incidence Small-Angle X-ray Scattering

Langmuir ◽  
2009 ◽  
Vol 25 (16) ◽  
pp. 9500-9509 ◽  
Author(s):  
Darren R. Dunphy ◽  
Todd M. Alam ◽  
Michael P. Tate ◽  
Hugh W. Hillhouse ◽  
Bernd Smarsly ◽  
...  
Keyword(s):  
Thin Film ◽  
Small Angle ◽  
Grazing Incidence ◽  
Hybrid Thin Film ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Resonant Grazing-Incidence Small-Angle X-ray Scattering at the Sulfur K-Edge for Material-Specific Investigation of Thin-Film Nanostructures

2018 ◽  
Vol 9 (11) ◽  
pp. 3081-3086 ◽  
Author(s):  
Mihael Coric ◽  
Nitin Saxena ◽  
Mika Pflüger ◽  
Peter Müller-Buschbaum ◽  
Michael Krumrey ◽  
...  
Keyword(s):  
Thin Film ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Thin Film Nanostructures ◽  
Ray Scattering

Grazing-incidence small-angle X-ray scattering: new tool for studying thin film growth

1989 ◽  
Vol 22 (6) ◽  
pp. 528-532 ◽  
Author(s):  
J. R. Levine ◽  
J. B. Cohen ◽  
Y. W. Chung ◽  
P. Georgopoulos
Keyword(s):  
Thin Film ◽  
Small Angle ◽  
Film Growth ◽  
Grazing Incidence ◽  
Thin Film Growth ◽  
Synchrotron Source ◽  
X Ray ◽  
X Ray Scattering ◽  
Sampling Statistics ◽  
Ray Scattering

Grazing-incidence small-angle X-ray scattering (GISAXS) is introduced as a method of studying discontinuous thin films. In this method, the incident beam is totally externally reflected from the substrate followed by small-angle scattering of the refracted beam by the thin film. The experiment described establishes the ability of GISAXS to provide size information for islands formed in the initial stages of thin film growth. The data presented are for gold films of 7 and 15 Å average thicknesses on Corning 7059 glass substrates. The advantages of this technique are that it is non-destructive, can be done in situ, provides excellent sampling statistics, does not necessarily require a synchrotron source, and is not limited to thin or conducting substrates.

Grazing Incidence Small-Angle X-ray Scattering Studies of the Thin Film Morphologies of Miktoarm Crystalline Star Polymers

2014 ◽  
Vol 6 (11) ◽  
pp. 2526-2531 ◽  
Author(s):  
Rarm Phinjaroenphan ◽  
Young Yong Kim ◽  
Sungmin Jung ◽  
Takuya Isono ◽  
Yusuke Satoh ◽  
...  
Keyword(s):  
Thin Film ◽  
Small Angle ◽  
Star Polymers ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Visualizing patterned thin films by grazing-incidence small-angle X-ray scattering coupled with computed tomography

2015 ◽  
Vol 48 (6) ◽  
pp. 1645-1650 ◽  
Author(s):  
Hiroki Ogawa ◽  
Yukihiro Nishikawa ◽  
Akihiko Fujiwara ◽  
Mikihito Takenaka ◽  
Yi-Chin Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Computed Tomography ◽  
Small Angle ◽  
Grazing Incidence ◽  
Two Dimensional ◽  
X Ray ◽  
X Ray Scattering ◽  
Model Sample ◽  
Ray Scattering

Images of the spatial distribution of nanostructures in thin films were successfully reconstructed by grazing-incidence small-angle X-ray scattering (GISAXS) coupled with computed tomography (CT) measurements. As a model sample of inhomogeneous thin films, a thin film was patterned with four characters (F, B, S and L) consisting of nanoparticles of gold (Au), platinum (Pt), Au/Pt and Pt/Au, respectively, on a silicon substrate. The characters each produced respective two-dimensional GISAXS images which reflect the nanoparticle structures and their correlations in the thin film. The application of the GISAXS-CT technique to the characteristic scattering GISAXS intensity of each component enables one to reconstruct the images of each character independently. Moreover, it was found that the patterned images could be reconstructed even from very weak scattered intensities at higherqpositions and the diffuse intensities. These results indicate that the GISAXS-CT method is a powerful tool to obtain distinct reconstruction images detailing the particle size, shape and surface roughness.

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