Effects of flow ratios on surface morphology and structure of hydrogenated amorphous carbon films prepared by microwave plasma chemical vapor deposition

2009 ◽  
Vol 255 (22) ◽  
pp. 9058-9061 ◽  
Author(s):  
S.B. Yang ◽  
F.M. Pan ◽  
Y.E. Yang ◽  
W.C. Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Plasma Chemical ◽  
Amorphous Carbon Films ◽  
Plasma Chemical Vapor Deposition ◽  
Morphology And Structure ◽  
Hydrogenated Amorphous

Boron-doped hydrogenated amorphous carbon films grown by surface-wave mode microwave plasma chemical vapor deposition

2006 ◽  
Vol 15 (11-12) ◽  
pp. 1909-1912 ◽  
Author(s):  
Sudip Adhikari ◽  
Dilip C. Ghimire ◽  
Hare Ram Aryal ◽  
Sunil Adhikary ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Wave Mode ◽  
Carbon Films ◽  
Plasma Chemical ◽  
Amorphous Carbon Films ◽  
Plasma Chemical Vapor Deposition ◽  
Boron Doped ◽  
Hydrogenated Amorphous
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