Surface modification of diamond-like carbon films to graphene under low energy ion beam irradiation

ABSTRACTWe present the crystallization effects occurring in sputtered amorphous Carbon (a-C) thin films deposited on Si induced by post-growth low energy (0.5-1.5 keV) Ar+ ion beam irradiation (IBI). The a-C films after IBI have the form of an amorphous matrix with embedded crystalline regions. X-ray diffraction and Electron Microscopy measurements identified the crystalline phases of carbon and SiC. We study in detail the effects of ion energy and fluence on the crystallization process. It was found that low fluence (∼2×1016 ions/cm2) of ions with an optimum ion energy (∼1.5 keV) promoted the diamond formation. X-Ray Reflectivity (XRR) and Spectroscopic Ellipsometry were used to study the amorphous matrix. XRR discriminated the IBI induced surface and bulk effects through the density and the a-C surface roughness, showing surface smoothing to be more prominent for low energy IBI.

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Superhydrophilic Surface Modification of Polyvinylidene Fluoride by Low Energy and High Flux ion Beam Irradiation

Korean Journal of Materials Research ◽

10.3740/mrsk.2005.15.6.382 ◽

2005 ◽

Vol 15 (6) ◽

pp. 382-387

Author(s):

Jong-Yong Park ◽

Yeon-Sik Jung ◽

Won-Kook Choi

Keyword(s):

Surface Modification ◽

Polyvinylidene Fluoride ◽

Ion Beam ◽

Low Energy ◽

High Flux ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Superhydrophilic Surface

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Superhydrophilic polymer surface modification by low energy reactive ion beam irradiation using a closed electron Hall drift ion source

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.11.145 ◽

2007 ◽

Vol 201 (19-20) ◽

pp. 8099-8104 ◽

Cited By ~ 15

Author(s):

Won-Kook Choi

Keyword(s):

Surface Modification ◽

Ion Beam ◽

Polymer Surface ◽

Ion Source ◽

Low Energy ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Polymer Surface Modification ◽

Closed Electron

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Polyimide Surface Modification by Low Energy Ion Beam Irradiation

Materials Science Forum ◽

10.4028/www.scientific.net/msf.492-493.659 ◽

2005 ◽

Vol 492-493 ◽

pp. 659-664 ◽

Cited By ~ 2

Author(s):

Won Jun Lee ◽

Youn Seoung Lee ◽

Sa Kyun Rha ◽

Kwang Yong Lim ◽

Hee Soo Lee ◽

...

Keyword(s):

Surface Roughness ◽

Surface Modification ◽

Low Dose ◽

Surface Composition ◽

Ion Beam ◽

Low Energy ◽

Low Doses ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Dose Ranging

The surface modification of polyimide (PI) by the irradiation of 3 keV He+, Ne+ and Ar+ ions was studied using XPS and AFM at various ion dose ranging from 1􀂯1014 to 1􀂯1017 ions/cm2. The change of surface roughness of PI by 3 keV inert ions was closely connected to the change of surface composition. At low doses below 5􀂯1015 ions/cm2, the surface of polyimide was carbonized by ion irradiations, showing rough surfaces. At higher ion doses, the surface composition was saturated due to the accumulation of damages, and the surface morphology became smoother as compared with the low dose case.

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