Surface and Bulk Microstructural Modifications in Amorphous Carbon Films after Post-Growth Low Energy Ion Beam Irradiation

2000 ◽  
Vol 650 ◽  
Author(s):  
P. Patsalas ◽  
S. Logothetidis

ABSTRACTWe present the crystallization effects occurring in sputtered amorphous Carbon (a-C) thin films deposited on Si induced by post-growth low energy (0.5-1.5 keV) Ar+ ion beam irradiation (IBI). The a-C films after IBI have the form of an amorphous matrix with embedded crystalline regions. X-ray diffraction and Electron Microscopy measurements identified the crystalline phases of carbon and SiC. We study in detail the effects of ion energy and fluence on the crystallization process. It was found that low fluence (∼2×1016 ions/cm2) of ions with an optimum ion energy (∼1.5 keV) promoted the diamond formation. X-Ray Reflectivity (XRR) and Spectroscopic Ellipsometry were used to study the amorphous matrix. XRR discriminated the IBI induced surface and bulk effects through the density and the a-C surface roughness, showing surface smoothing to be more prominent for low energy IBI.

2004 ◽  
Vol 228 (1-4) ◽  
pp. 151-157 ◽  
Author(s):  
P. Goudeau ◽  
J.L. Bechade ◽  
B. Boubeker ◽  
P.-O. Renault ◽  
A. Serrari ◽  
...  

2012 ◽  
Vol 101 (26) ◽  
pp. 263104 ◽  
Author(s):  
Osman El-Atwani ◽  
Anastassiya Suslova ◽  
Alexander DeMasi ◽  
Sean Gonderman ◽  
Justin Fowler ◽  
...  

1989 ◽  
Vol 157 ◽  
Author(s):  
R.M. Prppleo ◽  
M.R. Rrrujo ◽  
R.P. Livi

ABSTRACTWe discuss the amorphization process of semicrystalline and oriented PET (Polytethyleneterephtal ate)) thin toils by ion beam irradiation. P decrease in the bombarded samples melting point and enthalpy of fusion in the bombarded samples, as analysed by Differential Scanning Calorimetry (DSC), is associated with changes in the crystalline morphology and with an increase in the polymer disordered regions. Those facts are confirmed atso by a large decrease in the main X-ray diffraction peak amplitude as the tluence increases. P model of ion induced amorphization originally constructed for metals and semiconductors 11,23 was applied and cross-sections tor the process were obtained. The experimental data are well fitted using this model based on amorphization through the overlap of damage clusters, but an exclusive elastic collisions mechanism for the damage production cannot be inferred. As expected the electronic stopping mechanism also plays an important role in the polymer amorphization process.


PLoS ONE ◽  
2021 ◽  
Vol 16 (6) ◽  
pp. e0253870
Author(s):  
Satoru Yoshimura ◽  
Satoshi Sugimoto ◽  
Takae Takeuchi ◽  
Kensuke Murai ◽  
Masato Kiuchi

Tetramethyltin was decomposed in an ion source and the fragment ions produced were identified using a low-energy mass-selected ion beam machine. Dominant fragment ions were found to be H+, CH2+, and Sn+. Subsequently, fragment ions were mass-selected. The mass spectrum of the selected ions indicated that only a single peak appeared at the mass number of 120 u, being suggestive of the presence of 120Sn+ ions. The ion energy was set at the range of 20–100 eV. The Sn+ ion beam was irradiated to a Si substrate, and a film was then found deposited on the substrate after the ion beam irradiation. An X-ray diffraction measurement showed that the film obtained was metallic Sn. Then, the Sn+ ion beam was irradiated to a quartz crystal microbalance substrate. We found that most of the irradiated Sn+ ions were adhered to the substrate, at the ion energy levels of 25 and 58 eV, producing the Sn film, whereas a 107 eV Sn+ beam caused a significant proportion of Sn atoms in the film to detach from the substrate, probably due to sputtering.


Author(s):  
Satyanarayan Dhal ◽  
Pritam Das ◽  
Arpita Patro ◽  
Madhuchhanda Swain ◽  
Sheela Rani Hota ◽  
...  

2000 ◽  
Vol 647 ◽  
Author(s):  
Raúl A. Enrique ◽  
Pascal Bellon

AbstractIon-beam irradiation can be used as a processing tool to synthesize metastable materials. A particular case is the preparation of solid solutions from immiscible alloys, which have been achieved for a whole range of systems. In this process, enhanced solute concentration is obtained through the local mixing induced by each irradiation event, which if occurring at a high enough frequency, can outweigh demixing by thermal diffusion. The resulting microstructure forms in far from equilibrium conditions, and theoretical results for these kind of driven alloys have shown that novel microstructures exhibiting self-organization can develop. To test these predictions, we prepare Ag-Cu multilayered thin films that we subject to 1 MeV Kr+-ion irradiation at temperatures ranging from room temperature to 225 °C, and characterize the specimens by x-ray diffraction, TEM and STEM. We observe two different phenomena occurring at different length scales: On the one hand, regardless of the irradiation temperature, grains grow under irradiation until reaching a size limited by film thickness (~200 nm). On the other hand, the distribution of species inside the grains is greatly affected by the irradiation temperature. At intermediate temperatures, a semi-coherent decomposition is observed at a nanometer scale. This nanometer-scale decomposition phenomenon appears as an evidence of patterning, and thus confirms on the possibility of using ion-beam irradiation as a route to synthesize nanostructured materials with novel magnetic and optical properties.


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