Formation of superhydrophobic soda-lime glass surface using femtosecond laser pulses

AbstractLaser micromachining technology with 150 femtosecond pulses is developed to fabricate glass microfluidic devices. A short theoretical analysis of femtosecond laser ablation is reported to characterize the femtosecond laser micromachining. The ablated crater diameter is measured as a function of the number of laser pulses as well as laser fluence. Two different ablation regimes are observed and the transition between the regimes is dependent on both the laser fluence and the number of laser shots. Based on the ablation phenomena described, microfluidic devices are fabricated with commercially available soda lime glasses (76 mm × 26 mm × 1 mm, Knittel Glaser, Germany). In addition to a microchannel for microfluidics, the capillary as well as optical fiber for detecting is integrated on the same substrate. The substrate is successively packaged with a lid slide glass by a thermal direct bonding. The presented developments are suitable for fast turn-around design cycle and inexpensive procedure, which provide rapid prototyping of MEMS devices.

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Influence of Trap States on the Kinetics of Luminescence and Induced Light Absorption by Si Nanoparticles in a SiO2 Matrix at Their Excitation with Femtosecond Laser Pulses

Ukrainian Journal of Physics ◽

10.15407/ujpe58.01.0020 ◽

2013 ◽

Vol 58 (1) ◽

pp. 20-25

Author(s):

V.M. Kadan ◽

◽

I.Z. Indutnyi ◽

V.A. Dan’ko ◽

P.E. Shepelyavyi ◽

...

Keyword(s):

Femtosecond Laser ◽

Light Absorption ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Trap States ◽

Sio2 Matrix ◽

Si Nanoparticles ◽

Kinetics Of

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Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

MRS Proceedings ◽

10.1557/proc-780-y4.12 ◽

2003 ◽

Vol 780 ◽

Cited By ~ 1

Author(s):

R. Houbertz ◽

J. Schulz ◽

L. Fröhlich ◽

G. Domann ◽

M. Popall ◽

...

Keyword(s):

Femtosecond Laser ◽

Sol Gel ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Hybrid Polymer ◽

Organic Hybrid ◽

Two Photon ◽

Applied Technology ◽

Scale Structures ◽

Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

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