Rapid Prototyping of Glass Microfluidic Devices using Femtosecond Laser Pulses

2004 ◽  
Vol 820 ◽  
Author(s):  
Myung-Il Park ◽  
Jun Rye Choi ◽  
Mira Park ◽  
Dae Sik Choi ◽  
Sae Chae Jeoung ◽  
...  

AbstractLaser micromachining technology with 150 femtosecond pulses is developed to fabricate glass microfluidic devices. A short theoretical analysis of femtosecond laser ablation is reported to characterize the femtosecond laser micromachining. The ablated crater diameter is measured as a function of the number of laser pulses as well as laser fluence. Two different ablation regimes are observed and the transition between the regimes is dependent on both the laser fluence and the number of laser shots. Based on the ablation phenomena described, microfluidic devices are fabricated with commercially available soda lime glasses (76 mm × 26 mm × 1 mm, Knittel Glaser, Germany). In addition to a microchannel for microfluidics, the capillary as well as optical fiber for detecting is integrated on the same substrate. The substrate is successively packaged with a lid slide glass by a thermal direct bonding. The presented developments are suitable for fast turn-around design cycle and inexpensive procedure, which provide rapid prototyping of MEMS devices.

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1093
Author(s):  
Evaldas Kažukauskas ◽  
Simas Butkus ◽  
Piotr Tokarski ◽  
Vytautas Jukna ◽  
Martynas Barkauskas ◽  
...  

Biocompatible polymers are used for many different purposes (catheters, artificial heart components, dentistry products, etc.). An important field for biocompatible polymers is the production of vision implants known as intraocular lenses or custom-shape contact lenses. Typically, curved surfaces are manufactured by mechanical means such as milling, turning or lathe cutting. The 2.5 D objects/surfaces can also be manufactured by means of laser micromachining; however, due to the nature of light–matter interaction, it is difficult to produce a surface finish with surface roughness values lower than ~1 µm Ra. Therefore, laser micromachining alone can’t produce the final parts with optical-grade quality. Laser machined surfaces may be polished via mechanical methods; however, the process may take up to several days, which makes the production of implants economically challenging. The aim of this study is the investigation of the polishing capabilities of rough (~1 µm Ra) hydrophilic acrylic surfaces using bursts of femtosecond laser pulses. By changing different laser parameters, it was possible to find a regime where the surface roughness can be minimized to 18 nm Ra, while the polishing of the entire part takes a matter of seconds. The produced surface demonstrates a transparent appearance and the process shows great promise towards commercial fabrication of low surface roughness custom-shape optics.


2007 ◽  
Vol 539-543 ◽  
pp. 1951-1954 ◽  
Author(s):  
Tomokazu Sano ◽  
Kengo Takahashi ◽  
Akio Hirose ◽  
Kojiro F. Kobayashi

Dependence of the femtosecond laser ablation depth on the laser pulse energy was investigated for Zr55Al10Ni5Cu30 bulk metallic glass. Investigation of the femtosecond laser ablation of bulk metallic glasses has not been reported. Femtosecond laser pulses (wavelength of 800 nm, pulse width of 100 fs, pulse energies of 2 – 900 μJ) were focused and irradiated on the polished surface of metals in air. The ablation depth of the metallic glass is deeper than that of its crystallized metal at a pulse energy in the strong ablation region. We suggest that the energy loss at grain boundaries of hot electrons which is accelerated by the laser electric field influence the ablation depth in the strong ablation region.


2004 ◽  
Vol 79 (4-6) ◽  
pp. 859-864 ◽  
Author(s):  
J.T. Dickinson ◽  
S. Orlando ◽  
S.M. Avanesyan ◽  
S.C. Langford

2003 ◽  
Vol 94 (7) ◽  
pp. 4332-4340 ◽  
Author(s):  
J. B. Lonzaga ◽  
S. M. Avanesyan ◽  
S. C. Langford ◽  
J. T. Dickinson

2012 ◽  
Vol 30 (3) ◽  
pp. 473-479 ◽  
Author(s):  
Mohamed E. Shaheen ◽  
Brian J. Fryer

AbstractThe interaction of near infrared femtosecond laser pulses with a Cu based alloy (brass) in ambient air at atmospheric pressure and under different laser conditions was investigated. The effects of laser fluence and number of pulses on surface morphology and ablation rate were studied using scanning electron microscopy (SEM) and optical microscopy. Ablation rates were found to rapidly increase from 83 to 604 nm/pulse in the fluence range 1.14–12.21 J/cm2. At fluence >12.21 J/cm2, ablation rates increased slowly to a maximum (607 nm/pulse at 19.14 J/cm2), and then decreased at fluence higher than 20.47 J/cm2 to 564 nm/pulse at 24.89 J/cm2. Large amounts of ablated material in a form of agglomerated fine particles were observed around the ablation craters as the number of laser pulses and fluence increased. The study of surface morphology shows reduced thermal effects with femtosecond laser ablation in comparison to nanosecond laser ablation at low fluence.


Micromachines ◽  
2020 ◽  
Vol 11 (11) ◽  
pp. 994
Author(s):  
Andrea Crespi ◽  
Giacomo Corrielli

Femtosecond laser pulses have proven, in the recent years, their formidable potential as a micromachining tool applicable to a variety of materials [...]


Author(s):  
Fangjian Zhang ◽  
Shuchang Li ◽  
Anmin Chen ◽  
Yuanfei Jiang ◽  
Suyu Li ◽  
...  

The ultrafast dynamic process in semiconductor Ge irradiated by the femtosecond laser pulses is numerically simulated on the basis of van Driel system. It is found that with the increase of depth, the carrier density and lattice temperature decrease, while the carrier temperature first increases and then drops. The laser fluence has a great influence on the ultrafast dynamical process in Ge. As the laser fluence remains a constant value, though the overall evolution of the carrier density and lattice temperature is almost independent of pulse duration and laser intensity, increasing the laser intensity will be more effective than increasing the pulse duration in the generation of carriers. Irradiating the Ge sample by the femtosecond double pulses, the ultrafast dynamical process of semiconductor can be affected by the temporal interval between the double pulses.


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