Fabrication of highly (110)-oriented BaCeO3-based proton-conductive oxide thin films by RF magnetron sputtering method

2016 ◽  
Vol 55 (2S) ◽  
pp. 02BC19 ◽  
Author(s):  
Tomoya Sato ◽  
Takaaki Inoue ◽  
Daichi Ichinose ◽  
Hiroshi Funakubo ◽  
Kiyoshi Uchiyama
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Conductive Oxide

scholarly journals Effect of RF magnetron sputtering parameters on the optimization of the discharge capacity of ternary lithium oxide thin films

2021 ◽  
Author(s):  
Daniel Andres Sanchez Lopez ◽  
Luciana Gomes Chagas ◽  
Aline Domingues Batista ◽  
Maria Gabriella Detone Guaita ◽  
Luís Henrique Cardozo Amorin ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Discharge Capacity ◽  
Rf Magnetron Sputtering ◽  
Lithium Oxide ◽  
Oxide Thin Films

Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

1985 ◽  
Vol 24 (Part 2, No. 10) ◽  
pp. L781-L784 ◽  
Author(s):  
Tadatsugu Minami ◽  
Hirotoshi Sato ◽  
Hidehito Nanto ◽  
Shinzo Takata
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Group Iii ◽  
Impurity Doped

Vanadium oxide thin films prepared by RF magnetron sputtering method

2004 ◽  
Author(s):  
Zhishuan Li ◽  
Suntao Wu ◽  
Jing Li ◽  
Donghui Guo ◽  
Fuchun Xu
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Preparation and characteristics of Nb-doped indium tin oxide thin films by RF magnetron sputtering

2012 ◽  
Vol 8 (6) ◽  
pp. 460-463 ◽  
Author(s):  
Shi-na Li ◽  
Rui-xin Ma ◽  
Liang-wei He ◽  
Yu-qin Xiao ◽  
Jun-gang Hou ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films
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