Structural properties and preparation of Si-rich Si1−xCx thin films by radio-frequency magnetron sputtering

2016 ◽  
Vol 363 ◽  
pp. 477-482 ◽  
Author(s):  
Yisong He ◽  
Chao Ye ◽  
Xiangying Wang ◽  
Mingwei Gao ◽  
Jiaming Guo ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Structural Properties ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Compositional and Structural Properties of TiO 2− x N x Thin Films Deposited by Radio-Frequency Magnetron Sputtering

2006 ◽  
Vol 23 (3) ◽  
pp. 682-685 ◽  
Author(s):  
Jing Shi-Wei ◽  
Liu Yi-Chun ◽  
Liang Yu ◽  
Ma Jian-Gang ◽  
Lu You-Ming ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Structural Properties ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
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