The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

2018 ◽  
Vol 439 ◽  
pp. 545-551 ◽  
Author(s):  
Jinjiao Xia ◽  
Wenping Liang ◽  
Qiang Miao ◽  
Diederik Depla
Keyword(s):  
Thin Films ◽  
Momentum Transfer ◽  
Yttrium Oxide ◽  
Sputter Deposition ◽  
Oxide Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Energy And Momentum

Low-pressure reactive dc-magnetron sputter deposition of metal-oxide thin films

1992 ◽  
Author(s):  
Bradley J. Pond ◽  
Tu Du ◽  
J. Sobczak ◽  
Charles K. Carniglia ◽  
Forrest L. Williams
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Low Pressure ◽  
Sputter Deposition ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

2018 ◽  
Vol 5 (3) ◽  
pp. 036410 ◽  
Author(s):  
Poreddy Chaitanya Akshara ◽  
Guruswamy Rajaram ◽  
M Ghanashyam Krishna
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Composite Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Amorphous Sic
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